JPS535497A - Electric beam current control circuit - Google Patents
Electric beam current control circuitInfo
- Publication number
- JPS535497A JPS535497A JP8029976A JP8029976A JPS535497A JP S535497 A JPS535497 A JP S535497A JP 8029976 A JP8029976 A JP 8029976A JP 8029976 A JP8029976 A JP 8029976A JP S535497 A JPS535497 A JP S535497A
- Authority
- JP
- Japan
- Prior art keywords
- control circuit
- current control
- beam current
- electric beam
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To cut an electronic beam without increasing a cut-off bias thereby to nullify the need for increase of a dielectric strength, and prevent a discharge between a hot cathode and a Wehnelt electrode thereby to prevent a damage to a jig in a beam chamber when the beam is irradiated incidentally.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8029976A JPS5851385B2 (en) | 1976-07-06 | 1976-07-06 | Beam current control circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8029976A JPS5851385B2 (en) | 1976-07-06 | 1976-07-06 | Beam current control circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS535497A true JPS535497A (en) | 1978-01-19 |
JPS5851385B2 JPS5851385B2 (en) | 1983-11-16 |
Family
ID=13714384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8029976A Expired JPS5851385B2 (en) | 1976-07-06 | 1976-07-06 | Beam current control circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851385B2 (en) |
-
1976
- 1976-07-06 JP JP8029976A patent/JPS5851385B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5851385B2 (en) | 1983-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5516321A (en) | Electrostatic radiant type electronic gun | |
JPS55161341A (en) | Microwave ion source | |
JPS5418664A (en) | Semiconductor switch | |
JPS56121363A (en) | Gate circuit for thyristor | |
JPS52127168A (en) | Etching unit | |
JPS535497A (en) | Electric beam current control circuit | |
JPS5246300A (en) | Ionic source | |
JPS54129968A (en) | Electron gun | |
JPS51119287A (en) | Recutangular-shape beam ion source | |
JPS524163A (en) | Electric field radiation cathode | |
JPS5233055A (en) | Switching method of power source | |
JPS5628458A (en) | Atomic spectrum generating lamp | |
JPS5257543A (en) | High frequency heater | |
JPS5324649A (en) | High-frequency heater | |
JPS51127995A (en) | Control method of nuclear fusion device | |
JPS5715510A (en) | Travelling wave tube amplifier | |
JPS53136619A (en) | Switching power circuit | |
JPS5338966A (en) | Magnetron | |
JPS55104483A (en) | Ion etching method | |
JPS52129303A (en) | High-voltage power source unit for super high frequency electronic tube | |
JPS5383477A (en) | Reverse conducting thyristor | |
JPS5269092A (en) | Electron beam emitter | |
JPS53148095A (en) | Electric discharge machining apparatus | |
JPS5335361A (en) | Gate trigger circuit of thyristor | |
JPS5374237A (en) | Secondary open circuit protection for current transformer |