JPS5353266A - Probe card - Google Patents
Probe cardInfo
- Publication number
- JPS5353266A JPS5353266A JP12854876A JP12854876A JPS5353266A JP S5353266 A JPS5353266 A JP S5353266A JP 12854876 A JP12854876 A JP 12854876A JP 12854876 A JP12854876 A JP 12854876A JP S5353266 A JPS5353266 A JP S5353266A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- place
- low cost
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To obtain the probe card of low cost without using an expensive probe and requiring time for the adjusting work, by forming the copper film strip in place of the probe with photo etching.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12854876A JPS5353266A (en) | 1976-10-26 | 1976-10-26 | Probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12854876A JPS5353266A (en) | 1976-10-26 | 1976-10-26 | Probe card |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5353266A true JPS5353266A (en) | 1978-05-15 |
Family
ID=14987470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12854876A Pending JPS5353266A (en) | 1976-10-26 | 1976-10-26 | Probe card |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5353266A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54177276U (en) * | 1978-06-01 | 1979-12-14 | ||
JPS5992584A (en) * | 1982-11-18 | 1984-05-28 | Agency Of Ind Science & Technol | Probe for testing superconductive thin film functional integrated circuit element |
JPS621175U (en) * | 1985-06-19 | 1987-01-07 |
-
1976
- 1976-10-26 JP JP12854876A patent/JPS5353266A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54177276U (en) * | 1978-06-01 | 1979-12-14 | ||
JPS5992584A (en) * | 1982-11-18 | 1984-05-28 | Agency Of Ind Science & Technol | Probe for testing superconductive thin film functional integrated circuit element |
JPS6347333B2 (en) * | 1982-11-18 | 1988-09-21 | Kogyo Gijutsuin | |
JPS621175U (en) * | 1985-06-19 | 1987-01-07 |
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