JPS5353266A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5353266A
JPS5353266A JP12854876A JP12854876A JPS5353266A JP S5353266 A JPS5353266 A JP S5353266A JP 12854876 A JP12854876 A JP 12854876A JP 12854876 A JP12854876 A JP 12854876A JP S5353266 A JPS5353266 A JP S5353266A
Authority
JP
Japan
Prior art keywords
probe card
probe
place
low cost
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12854876A
Other languages
Japanese (ja)
Inventor
Kazuharu Saito
Yoshiaki Shiraishi
Nobuhiko Ito
Fumio Nakazawa
Katsuhiko Kita
Mitsutaka Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12854876A priority Critical patent/JPS5353266A/en
Publication of JPS5353266A publication Critical patent/JPS5353266A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To obtain the probe card of low cost without using an expensive probe and requiring time for the adjusting work, by forming the copper film strip in place of the probe with photo etching.
COPYRIGHT: (C)1978,JPO&Japio
JP12854876A 1976-10-26 1976-10-26 Probe card Pending JPS5353266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12854876A JPS5353266A (en) 1976-10-26 1976-10-26 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12854876A JPS5353266A (en) 1976-10-26 1976-10-26 Probe card

Publications (1)

Publication Number Publication Date
JPS5353266A true JPS5353266A (en) 1978-05-15

Family

ID=14987470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12854876A Pending JPS5353266A (en) 1976-10-26 1976-10-26 Probe card

Country Status (1)

Country Link
JP (1) JPS5353266A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54177276U (en) * 1978-06-01 1979-12-14
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JPS621175U (en) * 1985-06-19 1987-01-07

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54177276U (en) * 1978-06-01 1979-12-14
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JPS6347333B2 (en) * 1982-11-18 1988-09-21 Kogyo Gijutsuin
JPS621175U (en) * 1985-06-19 1987-01-07

Similar Documents

Publication Publication Date Title
JPS52119317A (en) Means for setting photograph information
JPS5224521A (en) Data co-photographing system
JPS5350613A (en) Synchronous signal processing circuit
JPS5394881A (en) Integrated circuit device
JPS5353266A (en) Probe card
JPS52111647A (en) Multioutput switching regulator circuit
JPS52119057A (en) Hold circuit
JPS5338340A (en) Display device
JPS5346222A (en) Solid state pick up unit
JPS5351928A (en) Optical character reading method and its unit
JPS5267275A (en) Semiconductor unit
JPS531545A (en) Solid electrooptical device
JPS51126190A (en) Optical measurement, calculation circuit
JPS51135538A (en) Sensitive composition for electronic photography
JPS539117A (en) Micro-fiche holder
JPS5363595A (en) Magnetic bubble device
JPS52142981A (en) Thermoelectromotive force element
JPS52143186A (en) Taping device
JPS52146139A (en) Obtaining method for 3 state output by using 2 state ttl circuit
JPS5371590A (en) Manufacture of photo transistor
JPS5382327A (en) Exposure control circuit
JPS5313750A (en) Elevator waiting time indicator
JPS51138305A (en) Information transfer circuit
JPS5364462A (en) Processing method of single crystal
JPS52129331A (en) Card draw-out unit