JPS5352472A - Method of detecting motion - Google Patents

Method of detecting motion

Info

Publication number
JPS5352472A
JPS5352472A JP12754776A JP12754776A JPS5352472A JP S5352472 A JPS5352472 A JP S5352472A JP 12754776 A JP12754776 A JP 12754776A JP 12754776 A JP12754776 A JP 12754776A JP S5352472 A JPS5352472 A JP S5352472A
Authority
JP
Japan
Prior art keywords
detecting motion
motion
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12754776A
Other languages
Japanese (ja)
Other versions
JPS5639429B2 (en
Inventor
Akira Kobayashi
Hideo Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denki Keisoku Kk
Original Assignee
Denki Keisoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Keisoku Kk filed Critical Denki Keisoku Kk
Priority to JP12754776A priority Critical patent/JPS5352472A/en
Publication of JPS5352472A publication Critical patent/JPS5352472A/en
Publication of JPS5639429B2 publication Critical patent/JPS5639429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
JP12754776A 1976-10-22 1976-10-22 Method of detecting motion Granted JPS5352472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12754776A JPS5352472A (en) 1976-10-22 1976-10-22 Method of detecting motion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12754776A JPS5352472A (en) 1976-10-22 1976-10-22 Method of detecting motion

Publications (2)

Publication Number Publication Date
JPS5352472A true JPS5352472A (en) 1978-05-12
JPS5639429B2 JPS5639429B2 (en) 1981-09-12

Family

ID=14962695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12754776A Granted JPS5352472A (en) 1976-10-22 1976-10-22 Method of detecting motion

Country Status (1)

Country Link
JP (1) JPS5352472A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225319A (en) * 1982-06-25 1983-12-27 Yokogawa Hokushin Electric Corp Optical fiber sensor
WO2004070393A1 (en) * 2003-02-05 2004-08-19 Japan As Represented By President Of University Of Tokyo Device for measuring motion of object

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7062562B2 (en) 2018-09-06 2022-05-06 キオクシア株式会社 Board processing method, board processing equipment and compound processing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067149U (en) * 1973-10-24 1975-06-16
JPS51100771A (en) * 1975-03-03 1976-09-06 Suteo Tsutsumi SOKOTAINITAISURUKYORISOKUTEIHOSHIKI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067149U (en) * 1973-10-24 1975-06-16
JPS51100771A (en) * 1975-03-03 1976-09-06 Suteo Tsutsumi SOKOTAINITAISURUKYORISOKUTEIHOSHIKI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225319A (en) * 1982-06-25 1983-12-27 Yokogawa Hokushin Electric Corp Optical fiber sensor
WO2004070393A1 (en) * 2003-02-05 2004-08-19 Japan As Represented By President Of University Of Tokyo Device for measuring motion of object

Also Published As

Publication number Publication date
JPS5639429B2 (en) 1981-09-12

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