JPS5350672A - Production of substrate for semiconductor device - Google Patents

Production of substrate for semiconductor device

Info

Publication number
JPS5350672A
JPS5350672A JP12567076A JP12567076A JPS5350672A JP S5350672 A JPS5350672 A JP S5350672A JP 12567076 A JP12567076 A JP 12567076A JP 12567076 A JP12567076 A JP 12567076A JP S5350672 A JPS5350672 A JP S5350672A
Authority
JP
Japan
Prior art keywords
production
substrate
semiconductor device
single crystal
crystal films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12567076A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Takeshi Yamano
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12567076A priority Critical patent/JPS5350672A/en
Publication of JPS5350672A publication Critical patent/JPS5350672A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce autodoping to single crystal films at the time of forming semiconductor single crystal films and production of semiconductor devices by preventing the reaction on the back of insulator single crystal plates.
COPYRIGHT: (C)1978,JPO&Japio
JP12567076A 1976-10-19 1976-10-19 Production of substrate for semiconductor device Pending JPS5350672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12567076A JPS5350672A (en) 1976-10-19 1976-10-19 Production of substrate for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12567076A JPS5350672A (en) 1976-10-19 1976-10-19 Production of substrate for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5350672A true JPS5350672A (en) 1978-05-09

Family

ID=14915741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12567076A Pending JPS5350672A (en) 1976-10-19 1976-10-19 Production of substrate for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5350672A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100724A (en) * 2004-09-30 2006-04-13 Oki Electric Ind Co Ltd Method for manufacturing semiconductor device
CN110396724A (en) * 2019-08-07 2019-11-01 苏州恒嘉晶体材料有限公司 A kind of processing method of sapphire optical piece

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663319A (en) * 1968-11-20 1972-05-16 Gen Motors Corp Masking to prevent autodoping of epitaxial deposits
US3769104A (en) * 1970-03-27 1973-10-30 Hitachi Ltd Method of preventing autodoping during the epitaxial growth of compound semiconductors from the vapor phase
JPS4929099A (en) * 1972-07-12 1974-03-15
JPS50159255A (en) * 1974-06-11 1975-12-23

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663319A (en) * 1968-11-20 1972-05-16 Gen Motors Corp Masking to prevent autodoping of epitaxial deposits
US3769104A (en) * 1970-03-27 1973-10-30 Hitachi Ltd Method of preventing autodoping during the epitaxial growth of compound semiconductors from the vapor phase
JPS4929099A (en) * 1972-07-12 1974-03-15
JPS50159255A (en) * 1974-06-11 1975-12-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100724A (en) * 2004-09-30 2006-04-13 Oki Electric Ind Co Ltd Method for manufacturing semiconductor device
CN110396724A (en) * 2019-08-07 2019-11-01 苏州恒嘉晶体材料有限公司 A kind of processing method of sapphire optical piece

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