JPS5346256B2 - - Google Patents
Info
- Publication number
- JPS5346256B2 JPS5346256B2 JP10516673A JP10516673A JPS5346256B2 JP S5346256 B2 JPS5346256 B2 JP S5346256B2 JP 10516673 A JP10516673 A JP 10516673A JP 10516673 A JP10516673 A JP 10516673A JP S5346256 B2 JPS5346256 B2 JP S5346256B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Power Conversion In General (AREA)
- Thyristor Switches And Gates (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10516673A JPS5346256B2 (en) | 1973-09-18 | 1973-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10516673A JPS5346256B2 (en) | 1973-09-18 | 1973-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5055854A JPS5055854A (en) | 1975-05-16 |
| JPS5346256B2 true JPS5346256B2 (en) | 1978-12-12 |
Family
ID=14400089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10516673A Expired JPS5346256B2 (en) | 1973-09-18 | 1973-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5346256B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0731066U (en) * | 1993-02-16 | 1995-06-13 | 強 鈴木 | Hydraulic type strength strengthening device |
| US11114321B2 (en) | 2017-08-17 | 2021-09-07 | Tokyo Electron Limited | Apparatus and method for real-time sensing of properties in industrial manufacturing equipment |
| US11646210B2 (en) | 2018-06-18 | 2023-05-09 | Tokyo Electron Limited | Reduced interference, real-time sensing of properties in manufacturing equipment |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5232547A (en) * | 1975-09-09 | 1977-03-11 | Omron Tateisi Electronics Co | Three phase solid relay |
| JPS5254935A (en) * | 1975-10-31 | 1977-05-04 | Omron Tateisi Electronics Co | Solid relay for three phase |
-
1973
- 1973-09-18 JP JP10516673A patent/JPS5346256B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0731066U (en) * | 1993-02-16 | 1995-06-13 | 強 鈴木 | Hydraulic type strength strengthening device |
| US11114321B2 (en) | 2017-08-17 | 2021-09-07 | Tokyo Electron Limited | Apparatus and method for real-time sensing of properties in industrial manufacturing equipment |
| US11646210B2 (en) | 2018-06-18 | 2023-05-09 | Tokyo Electron Limited | Reduced interference, real-time sensing of properties in manufacturing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5055854A (en) | 1975-05-16 |