JPS5336483A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5336483A
JPS5336483A JP11074676A JP11074676A JPS5336483A JP S5336483 A JPS5336483 A JP S5336483A JP 11074676 A JP11074676 A JP 11074676A JP 11074676 A JP11074676 A JP 11074676A JP S5336483 A JPS5336483 A JP S5336483A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
sos
mosfet
oxidizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11074676A
Other languages
Japanese (ja)
Inventor
Masayoshi Ino
Takao Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP11074676A priority Critical patent/JPS5336483A/en
Publication of JPS5336483A publication Critical patent/JPS5336483A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a high-performance SOS-MOSFET through isolation between elements by oxidizing Si only of part of the field and removing others through etching.
COPYRIGHT: (C)1978,JPO&Japio
JP11074676A 1976-09-17 1976-09-17 Manufacture of semiconductor device Pending JPS5336483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11074676A JPS5336483A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11074676A JPS5336483A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5336483A true JPS5336483A (en) 1978-04-04

Family

ID=14543482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11074676A Pending JPS5336483A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5336483A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141684A (en) * 1981-02-26 1982-09-02 Matsushita Electric Ind Co Ltd Manufacture of matrix display panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141684A (en) * 1981-02-26 1982-09-02 Matsushita Electric Ind Co Ltd Manufacture of matrix display panel

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