JPS5336483A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5336483A JPS5336483A JP11074676A JP11074676A JPS5336483A JP S5336483 A JPS5336483 A JP S5336483A JP 11074676 A JP11074676 A JP 11074676A JP 11074676 A JP11074676 A JP 11074676A JP S5336483 A JPS5336483 A JP S5336483A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- sos
- mosfet
- oxidizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a high-performance SOS-MOSFET through isolation between elements by oxidizing Si only of part of the field and removing others through etching.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11074676A JPS5336483A (en) | 1976-09-17 | 1976-09-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11074676A JPS5336483A (en) | 1976-09-17 | 1976-09-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5336483A true JPS5336483A (en) | 1978-04-04 |
Family
ID=14543482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11074676A Pending JPS5336483A (en) | 1976-09-17 | 1976-09-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5336483A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57141684A (en) * | 1981-02-26 | 1982-09-02 | Matsushita Electric Ind Co Ltd | Manufacture of matrix display panel |
-
1976
- 1976-09-17 JP JP11074676A patent/JPS5336483A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57141684A (en) * | 1981-02-26 | 1982-09-02 | Matsushita Electric Ind Co Ltd | Manufacture of matrix display panel |
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