JPS5336263A - Apparatus for detecting polishing condition of piezoelectric element - Google Patents

Apparatus for detecting polishing condition of piezoelectric element

Info

Publication number
JPS5336263A
JPS5336263A JP11099076A JP11099076A JPS5336263A JP S5336263 A JPS5336263 A JP S5336263A JP 11099076 A JP11099076 A JP 11099076A JP 11099076 A JP11099076 A JP 11099076A JP S5336263 A JPS5336263 A JP S5336263A
Authority
JP
Japan
Prior art keywords
piezoelectric element
polishing condition
detecting polishing
detecting
condition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11099076A
Other languages
Japanese (ja)
Other versions
JPS5850819B2 (en
Inventor
Nakanobu Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP51110990A priority Critical patent/JPS5850819B2/en
Publication of JPS5336263A publication Critical patent/JPS5336263A/en
Publication of JPS5850819B2 publication Critical patent/JPS5850819B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP51110990A 1976-09-16 1976-09-16 Processing state detection device for piezoelectric elements Expired JPS5850819B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51110990A JPS5850819B2 (en) 1976-09-16 1976-09-16 Processing state detection device for piezoelectric elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51110990A JPS5850819B2 (en) 1976-09-16 1976-09-16 Processing state detection device for piezoelectric elements

Publications (2)

Publication Number Publication Date
JPS5336263A true JPS5336263A (en) 1978-04-04
JPS5850819B2 JPS5850819B2 (en) 1983-11-12

Family

ID=14549596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51110990A Expired JPS5850819B2 (en) 1976-09-16 1976-09-16 Processing state detection device for piezoelectric elements

Country Status (1)

Country Link
JP (1) JPS5850819B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633229A (en) * 1979-08-10 1981-04-03 Oerlikon Buehrle Holding Ag Manufacture of gear with tooth surface by generating process and gear cutting machine device for executing said method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633229A (en) * 1979-08-10 1981-04-03 Oerlikon Buehrle Holding Ag Manufacture of gear with tooth surface by generating process and gear cutting machine device for executing said method

Also Published As

Publication number Publication date
JPS5850819B2 (en) 1983-11-12

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