JPS5336263A - Apparatus for detecting polishing condition of piezoelectric element - Google Patents
Apparatus for detecting polishing condition of piezoelectric elementInfo
- Publication number
- JPS5336263A JPS5336263A JP11099076A JP11099076A JPS5336263A JP S5336263 A JPS5336263 A JP S5336263A JP 11099076 A JP11099076 A JP 11099076A JP 11099076 A JP11099076 A JP 11099076A JP S5336263 A JPS5336263 A JP S5336263A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- polishing condition
- detecting polishing
- detecting
- condition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51110990A JPS5850819B2 (en) | 1976-09-16 | 1976-09-16 | Processing state detection device for piezoelectric elements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51110990A JPS5850819B2 (en) | 1976-09-16 | 1976-09-16 | Processing state detection device for piezoelectric elements |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5336263A true JPS5336263A (en) | 1978-04-04 |
JPS5850819B2 JPS5850819B2 (en) | 1983-11-12 |
Family
ID=14549596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51110990A Expired JPS5850819B2 (en) | 1976-09-16 | 1976-09-16 | Processing state detection device for piezoelectric elements |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850819B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633229A (en) * | 1979-08-10 | 1981-04-03 | Oerlikon Buehrle Holding Ag | Manufacture of gear with tooth surface by generating process and gear cutting machine device for executing said method |
-
1976
- 1976-09-16 JP JP51110990A patent/JPS5850819B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633229A (en) * | 1979-08-10 | 1981-04-03 | Oerlikon Buehrle Holding Ag | Manufacture of gear with tooth surface by generating process and gear cutting machine device for executing said method |
Also Published As
Publication number | Publication date |
---|---|
JPS5850819B2 (en) | 1983-11-12 |
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