JPS5334535A - Observation object supporting system - Google Patents

Observation object supporting system

Info

Publication number
JPS5334535A
JPS5334535A JP10878076A JP10878076A JPS5334535A JP S5334535 A JPS5334535 A JP S5334535A JP 10878076 A JP10878076 A JP 10878076A JP 10878076 A JP10878076 A JP 10878076A JP S5334535 A JPS5334535 A JP S5334535A
Authority
JP
Japan
Prior art keywords
observation object
supporting system
object supporting
observation
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10878076A
Other languages
Japanese (ja)
Inventor
Michio Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10878076A priority Critical patent/JPS5334535A/en
Publication of JPS5334535A publication Critical patent/JPS5334535A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE: To effectively prevent the contamination of observation object by dust, etc. by holding the observation in such a manner that its main plane becomes substantially vertical.
COPYRIGHT: (C)1978,JPO&Japio
JP10878076A 1976-09-13 1976-09-13 Observation object supporting system Pending JPS5334535A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10878076A JPS5334535A (en) 1976-09-13 1976-09-13 Observation object supporting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10878076A JPS5334535A (en) 1976-09-13 1976-09-13 Observation object supporting system

Publications (1)

Publication Number Publication Date
JPS5334535A true JPS5334535A (en) 1978-03-31

Family

ID=14493281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10878076A Pending JPS5334535A (en) 1976-09-13 1976-09-13 Observation object supporting system

Country Status (1)

Country Link
JP (1) JPS5334535A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175644A (en) * 1990-02-23 1992-12-29 Olympus Optical Co., Ltd. Microscope apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175644A (en) * 1990-02-23 1992-12-29 Olympus Optical Co., Ltd. Microscope apparatus

Similar Documents

Publication Publication Date Title
JPS5318967A (en) Wafer sucking jig
JPS5211655A (en) Dust-proof device for mat etc
JPS51114989A (en) Oxygen depletion sensor
JPS5334535A (en) Observation object supporting system
JPS5219561A (en) Distance-detecting system
JPS5229007A (en) Device for supporting connector
JPS52147071A (en) Basket for etching
JPS5245817A (en) Hadmard conversion system in picture image processing
JPS5233443A (en) System down restoring system
JPS5279642A (en) Information processing system
JPS5351592A (en) Device for supporting gauge bar used for inner-surface grinder
JPS5351892A (en) Surface working bench
JPS539117A (en) Micro-fiche holder
JPS5337099A (en) Accepting apparatus for registered mail or the like
JPS524127A (en) Display equipment
JPS52153818A (en) Basic slag
JPS5421674A (en) Liquid separating device
JPS5267403A (en) Load limit system
JPS5351962A (en) Dicing unit providing automatic handling mechanism
JPS52141571A (en) Wafer holder
JPS53148835A (en) Device for coupling vertical and horizontal frames
JPS52155938A (en) Artificial shift system for data
JPS5237728A (en) Display system
JPS52127718A (en) Character display unit
JPS534911A (en) Train approach detector