JPS5333590A - Production of substrate for semiconductor integrated circuit - Google Patents

Production of substrate for semiconductor integrated circuit

Info

Publication number
JPS5333590A
JPS5333590A JP10781076A JP10781076A JPS5333590A JP S5333590 A JPS5333590 A JP S5333590A JP 10781076 A JP10781076 A JP 10781076A JP 10781076 A JP10781076 A JP 10781076A JP S5333590 A JPS5333590 A JP S5333590A
Authority
JP
Japan
Prior art keywords
substrate
production
integrated circuit
semiconductor integrated
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10781076A
Other languages
Japanese (ja)
Inventor
Takaya Suzuki
Tatsuya Kamei
Satoru Ogiwara
Takuzo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10781076A priority Critical patent/JPS5333590A/en
Priority to DE19772738614 priority patent/DE2738614A1/en
Publication of JPS5333590A publication Critical patent/JPS5333590A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To obtain an IC substrate isolated by a dielectric material by thermo-compression bonding a support substrate via insulation film on the single crystal Si substrate wherein the isolating grooves provided on one main surface are buried by polycrystalline Si film to a flat surface, then removing the single crystal Si substrate by polishing and etching it down to the isolating grooves.
COPYRIGHT: (C)1978,JPO&Japio
JP10781076A 1976-09-01 1976-09-10 Production of substrate for semiconductor integrated circuit Pending JPS5333590A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10781076A JPS5333590A (en) 1976-09-10 1976-09-10 Production of substrate for semiconductor integrated circuit
DE19772738614 DE2738614A1 (en) 1976-09-01 1977-08-26 Integrated circuit module - produced by glass film bonding one substrate for silicon island domains to another as carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10781076A JPS5333590A (en) 1976-09-10 1976-09-10 Production of substrate for semiconductor integrated circuit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP10774777A Division JPS5334483A (en) 1977-09-09 1977-09-09 Substrate for semiconductor integrating circuit

Publications (1)

Publication Number Publication Date
JPS5333590A true JPS5333590A (en) 1978-03-29

Family

ID=14468599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10781076A Pending JPS5333590A (en) 1976-09-01 1976-09-10 Production of substrate for semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5333590A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138759U (en) * 1978-03-16 1979-09-26
JPS6314449A (en) * 1986-07-04 1988-01-21 Nec Corp Manufacture of dielectric isolation substrate
JPS6354740A (en) * 1986-08-25 1988-03-09 Nec Corp Manufacture of integrated circuit substrate
JPH01136328A (en) * 1987-11-20 1989-05-29 Sony Corp Manufacture of semiconductor substrate
JPH029148A (en) * 1988-06-28 1990-01-12 Shin Etsu Handotai Co Ltd Manufacture of substrates for integrated circuits
JPH0223629A (en) * 1988-07-12 1990-01-25 Nec Corp Manufacture of semiconductor device
JPH0645429A (en) * 1992-07-27 1994-02-18 Nec Corp Manufacture of semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138759U (en) * 1978-03-16 1979-09-26
JPS6314449A (en) * 1986-07-04 1988-01-21 Nec Corp Manufacture of dielectric isolation substrate
JPS6354740A (en) * 1986-08-25 1988-03-09 Nec Corp Manufacture of integrated circuit substrate
JPH01136328A (en) * 1987-11-20 1989-05-29 Sony Corp Manufacture of semiconductor substrate
JPH029148A (en) * 1988-06-28 1990-01-12 Shin Etsu Handotai Co Ltd Manufacture of substrates for integrated circuits
JPH0223629A (en) * 1988-07-12 1990-01-25 Nec Corp Manufacture of semiconductor device
JPH0645429A (en) * 1992-07-27 1994-02-18 Nec Corp Manufacture of semiconductor device

Similar Documents

Publication Publication Date Title
JPS54161268A (en) Method of manufacturing semiconductor device growing silicon layer on sapphire substrate
JPS5563840A (en) Semiconductor integrated device
JPS54589A (en) Burying method of insulator
JPS5333590A (en) Production of substrate for semiconductor integrated circuit
JPS52156580A (en) Semiconductor integrated circuit device and its production
JPS55121669A (en) Method of forming inactive layer on integrated circuit device having substrate of semiconductor material
JPS5330284A (en) Production of substrate for semiconductor integrated circuits
JPS52149076A (en) Semiconductor integrated circuit and its preparing method
JPS5243385A (en) Process for production of semiconductor integrated circuit
JPS5317068A (en) Semiconductor device and its production
JPS52119084A (en) Manufacture of semiconductor integrated circuit
JPS57109353A (en) Semiconductor device
JPS5289468A (en) Semiconductor device
JPS5285489A (en) Semiconductor reactance element
JPS52127786A (en) Semiconductor device and its preparation
JPS5530844A (en) Semiconductor device and its manufacturing method
JPS5352379A (en) Production of dielectric isolated ic substrate
JPS5245290A (en) Integrated circuit of semiconductor and method for its fabrication
JPS5326585A (en) Production of mis semiconductor device
JPS5440077A (en) Manufacture of semiconductor integrated circuit device substrate
JPS6439745A (en) Manufacture of semiconductor substrate for integrated circuit device
JPS5336180A (en) Production of semiconductor device
JPS5319774A (en) Semiconductor integrated circuit
JPS56137617A (en) Semiconductor crystal substrate
JPS538082A (en) Production of semiconductor device