JPS5333590A - Production of substrate for semiconductor integrated circuit - Google Patents
Production of substrate for semiconductor integrated circuitInfo
- Publication number
- JPS5333590A JPS5333590A JP10781076A JP10781076A JPS5333590A JP S5333590 A JPS5333590 A JP S5333590A JP 10781076 A JP10781076 A JP 10781076A JP 10781076 A JP10781076 A JP 10781076A JP S5333590 A JPS5333590 A JP S5333590A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- production
- integrated circuit
- semiconductor integrated
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain an IC substrate isolated by a dielectric material by thermo-compression bonding a support substrate via insulation film on the single crystal Si substrate wherein the isolating grooves provided on one main surface are buried by polycrystalline Si film to a flat surface, then removing the single crystal Si substrate by polishing and etching it down to the isolating grooves.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10781076A JPS5333590A (en) | 1976-09-10 | 1976-09-10 | Production of substrate for semiconductor integrated circuit |
DE19772738614 DE2738614A1 (en) | 1976-09-01 | 1977-08-26 | Integrated circuit module - produced by glass film bonding one substrate for silicon island domains to another as carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10781076A JPS5333590A (en) | 1976-09-10 | 1976-09-10 | Production of substrate for semiconductor integrated circuit |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10774777A Division JPS5334483A (en) | 1977-09-09 | 1977-09-09 | Substrate for semiconductor integrating circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333590A true JPS5333590A (en) | 1978-03-29 |
Family
ID=14468599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10781076A Pending JPS5333590A (en) | 1976-09-01 | 1976-09-10 | Production of substrate for semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333590A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54138759U (en) * | 1978-03-16 | 1979-09-26 | ||
JPS6314449A (en) * | 1986-07-04 | 1988-01-21 | Nec Corp | Manufacture of dielectric isolation substrate |
JPS6354740A (en) * | 1986-08-25 | 1988-03-09 | Nec Corp | Manufacture of integrated circuit substrate |
JPH01136328A (en) * | 1987-11-20 | 1989-05-29 | Sony Corp | Manufacture of semiconductor substrate |
JPH029148A (en) * | 1988-06-28 | 1990-01-12 | Shin Etsu Handotai Co Ltd | Manufacture of substrates for integrated circuits |
JPH0223629A (en) * | 1988-07-12 | 1990-01-25 | Nec Corp | Manufacture of semiconductor device |
JPH0645429A (en) * | 1992-07-27 | 1994-02-18 | Nec Corp | Manufacture of semiconductor device |
-
1976
- 1976-09-10 JP JP10781076A patent/JPS5333590A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54138759U (en) * | 1978-03-16 | 1979-09-26 | ||
JPS6314449A (en) * | 1986-07-04 | 1988-01-21 | Nec Corp | Manufacture of dielectric isolation substrate |
JPS6354740A (en) * | 1986-08-25 | 1988-03-09 | Nec Corp | Manufacture of integrated circuit substrate |
JPH01136328A (en) * | 1987-11-20 | 1989-05-29 | Sony Corp | Manufacture of semiconductor substrate |
JPH029148A (en) * | 1988-06-28 | 1990-01-12 | Shin Etsu Handotai Co Ltd | Manufacture of substrates for integrated circuits |
JPH0223629A (en) * | 1988-07-12 | 1990-01-25 | Nec Corp | Manufacture of semiconductor device |
JPH0645429A (en) * | 1992-07-27 | 1994-02-18 | Nec Corp | Manufacture of semiconductor device |
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