JPS5333579A - Semiconductor device production - Google Patents
Semiconductor device productionInfo
- Publication number
- JPS5333579A JPS5333579A JP10812876A JP10812876A JPS5333579A JP S5333579 A JPS5333579 A JP S5333579A JP 10812876 A JP10812876 A JP 10812876A JP 10812876 A JP10812876 A JP 10812876A JP S5333579 A JPS5333579 A JP S5333579A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- device production
- moat
- glass film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent glass film from spreading to substrate surface by opening holes in the corrosion resistant insulation film on the moat surface formed by etching, at moat bottom part and forming a thin glass film at this part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10812876A JPS5333579A (en) | 1976-09-09 | 1976-09-09 | Semiconductor device production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10812876A JPS5333579A (en) | 1976-09-09 | 1976-09-09 | Semiconductor device production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333579A true JPS5333579A (en) | 1978-03-29 |
Family
ID=14476634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10812876A Pending JPS5333579A (en) | 1976-09-09 | 1976-09-09 | Semiconductor device production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333579A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4808550A (en) * | 1985-09-17 | 1989-02-28 | Fujitsu Limited | Method of producing isolation groove structure |
-
1976
- 1976-09-09 JP JP10812876A patent/JPS5333579A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4808550A (en) * | 1985-09-17 | 1989-02-28 | Fujitsu Limited | Method of producing isolation groove structure |
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