JPS5333579A - Semiconductor device production - Google Patents

Semiconductor device production

Info

Publication number
JPS5333579A
JPS5333579A JP10812876A JP10812876A JPS5333579A JP S5333579 A JPS5333579 A JP S5333579A JP 10812876 A JP10812876 A JP 10812876A JP 10812876 A JP10812876 A JP 10812876A JP S5333579 A JPS5333579 A JP S5333579A
Authority
JP
Japan
Prior art keywords
semiconductor device
device production
moat
glass film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10812876A
Other languages
Japanese (ja)
Inventor
Tsuneo Atsumi
Masafumi Miyagawa
Kenichi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10812876A priority Critical patent/JPS5333579A/en
Publication of JPS5333579A publication Critical patent/JPS5333579A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To prevent glass film from spreading to substrate surface by opening holes in the corrosion resistant insulation film on the moat surface formed by etching, at moat bottom part and forming a thin glass film at this part.
COPYRIGHT: (C)1978,JPO&Japio
JP10812876A 1976-09-09 1976-09-09 Semiconductor device production Pending JPS5333579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10812876A JPS5333579A (en) 1976-09-09 1976-09-09 Semiconductor device production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10812876A JPS5333579A (en) 1976-09-09 1976-09-09 Semiconductor device production

Publications (1)

Publication Number Publication Date
JPS5333579A true JPS5333579A (en) 1978-03-29

Family

ID=14476634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10812876A Pending JPS5333579A (en) 1976-09-09 1976-09-09 Semiconductor device production

Country Status (1)

Country Link
JP (1) JPS5333579A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808550A (en) * 1985-09-17 1989-02-28 Fujitsu Limited Method of producing isolation groove structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808550A (en) * 1985-09-17 1989-02-28 Fujitsu Limited Method of producing isolation groove structure

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