JPS5327103A - Vermiculation system pump - Google Patents

Vermiculation system pump

Info

Publication number
JPS5327103A
JPS5327103A JP10137476A JP10137476A JPS5327103A JP S5327103 A JPS5327103 A JP S5327103A JP 10137476 A JP10137476 A JP 10137476A JP 10137476 A JP10137476 A JP 10137476A JP S5327103 A JPS5327103 A JP S5327103A
Authority
JP
Japan
Prior art keywords
vermiculation
system pump
long term
fluid delivery
control fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10137476A
Other languages
Japanese (ja)
Other versions
JPS5732231B2 (en
Inventor
Isamu Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP10137476A priority Critical patent/JPS5327103A/en
Publication of JPS5327103A publication Critical patent/JPS5327103A/en
Publication of JPS5732231B2 publication Critical patent/JPS5732231B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • External Artificial Organs (AREA)

Abstract

PURPOSE: To ensure continuous use for a long term without possessing mechanical arrangement parts, and to easily control fluid delivery quantity.
COPYRIGHT: (C)1978,JPO&Japio
JP10137476A 1976-08-25 1976-08-25 Vermiculation system pump Granted JPS5327103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10137476A JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10137476A JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Publications (2)

Publication Number Publication Date
JPS5327103A true JPS5327103A (en) 1978-03-14
JPS5732231B2 JPS5732231B2 (en) 1982-07-09

Family

ID=14299026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10137476A Granted JPS5327103A (en) 1976-08-25 1976-08-25 Vermiculation system pump

Country Status (1)

Country Link
JP (1) JPS5327103A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4432699A (en) * 1982-05-04 1984-02-21 The Abet Group Peristaltic piezoelectric pump with internal load sensor
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
JPS62247183A (en) * 1986-04-17 1987-10-28 Nec Corp Micro-pump
JPH024382A (en) * 1988-06-23 1990-01-09 Teru Hayashi Liquid sending pump
US5317223A (en) * 1987-01-21 1994-05-31 Dynamotive Corporation Method and device in magnetostrictive motion systems
WO2001033078A1 (en) * 1999-11-02 2001-05-10 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
US6362946B1 (en) 1999-11-02 2002-03-26 Varian Semiconductor Equipment Associates, Inc. Electrostatic wafer clamp having electrostatic seal for retaining gas

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4432699A (en) * 1982-05-04 1984-02-21 The Abet Group Peristaltic piezoelectric pump with internal load sensor
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
JPS62247183A (en) * 1986-04-17 1987-10-28 Nec Corp Micro-pump
US5317223A (en) * 1987-01-21 1994-05-31 Dynamotive Corporation Method and device in magnetostrictive motion systems
JPH024382A (en) * 1988-06-23 1990-01-09 Teru Hayashi Liquid sending pump
WO2001033078A1 (en) * 1999-11-02 2001-05-10 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
US6362946B1 (en) 1999-11-02 2002-03-26 Varian Semiconductor Equipment Associates, Inc. Electrostatic wafer clamp having electrostatic seal for retaining gas
US6538873B1 (en) 1999-11-02 2003-03-25 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
JP2003514174A (en) * 1999-11-02 2003-04-15 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド Active electrostatic seals and vacuum pumps
JP4827156B2 (en) * 1999-11-02 2011-11-30 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド Active electrostatic seal and electrostatic vacuum pump

Also Published As

Publication number Publication date
JPS5732231B2 (en) 1982-07-09

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