JPS5323663B1 - - Google Patents

Info

Publication number: JPS5323663B1
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2233871A

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-04-12

Filing date

1971-04-12

Publication date

1978-07-15

1971-04-12 Application filed filed Critical

1971-04-12 Priority to JP2233871A priority Critical patent/JPS5323663B1/ja

1972-04-12 Priority to DE19722217660 priority patent/DE2217660A1/en

1972-04-12 Priority to US00243215A priority patent/US3786268A/en

1972-04-12 Priority to NL7204863.A priority patent/NL155979B/en

1978-07-15 Publication of JPS5323663B1 publication Critical patent/JPS5323663B1/ja

Status Pending legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Sources, Ion Sources (AREA)

JP2233871A 1971-04-12 1971-04-12 Pending JPS5323663B1 (en)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP2233871A JPS5323663B1 (en)	1971-04-12	1971-04-12
DE19722217660 DE2217660A1 (en)	1971-04-12	1972-04-12	Field emission type electron gun
US00243215A US3786268A (en)	1971-04-12	1972-04-12	Electron gun device of field emission type
NL7204863.A NL155979B (en)	1971-04-12	1972-04-12	ELECTRONIC GUN OF THE FIELD EMISSION TYPE.

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2233871A JPS5323663B1 (en)	1971-04-12	1971-04-12

Publications (1)

Publication Number	Publication Date
JPS5323663B1 true JPS5323663B1 (en)	1978-07-15

Family

ID=12079897

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2233871A Pending JPS5323663B1 (en)	1971-04-12	1971-04-12

Country Status (4)

Country	Link
US (1)	US3786268A (en)
JP (1)	JPS5323663B1 (en)
DE (1)	DE2217660A1 (en)
NL (1)	NL155979B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2007073521A (en) *	2005-09-05	2007-03-22	Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh	Electrically-charged particle beam irradiation device and method for operating it

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5420828B2 (en) *	1972-06-09	1979-07-25
DE2851743C2 (en) *	1978-11-30	1980-08-28	Kernforschungsanlage Juelich Gmbh, 5170 Juelich	Electron impact spectrometer
JPS57191950A (en) *	1981-05-22	1982-11-25	Hitachi Ltd	Charged-particle source
WO1987004846A1 (en) *	1986-02-03	1987-08-13	Crewe Albert V	Electron beam memory system with ultra-compact, high current density electron gun
US4740705A (en) *	1986-08-11	1988-04-26	Electron Beam Memories	Axially compact field emission cathode assembly
US4760567A (en) *	1986-08-11	1988-07-26	Electron Beam Memories	Electron beam memory system with ultra-compact, high current density electron gun
JP3131339B2 (en) *	1993-12-22	2001-01-31	三菱電機株式会社	Cathode, cathode ray tube and method of operating cathode ray tube
US5848118A (en) *	1997-06-19	1998-12-08	Lear Corporation	Method and apparatus for detecting inhomogeneities in seat assemblies
FR2792770A1 (en)	1999-04-22	2000-10-27	Cit Alcatel	Increased vacuum residual pressure micropoint electron emission generator having cathode and interspersed electrons with rear heating element maintaining temperature above ambient.
DE112009001537B8 (en)	2008-06-20	2019-01-24	Hitachi High-Technologies Corporation	Charged particle beam device and method of controlling the device
US8188451B1 (en) *	2008-09-24	2012-05-29	Kla-Tencor Corporation	Electron generation and delivery system for contamination sensitive emitters
EP2365511B1 (en) *	2010-03-10	2013-05-08	ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH	Feedback loop for emitter flash cleaning
JP6345273B2 (en)	2014-12-26	2018-06-20	株式会社日立ハイテクノロジーズ	Composite charged particle beam apparatus and control method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1246744A (en) *	1969-01-02	1971-09-15	Graham Stuart Plows	Electron beam apparatus

1971
- 1971-04-12 JP JP2233871A patent/JPS5323663B1/ja active Pending
1972
- 1972-04-12 US US00243215A patent/US3786268A/en not_active Expired - Lifetime
- 1972-04-12 DE DE19722217660 patent/DE2217660A1/en active Pending
- 1972-04-12 NL NL7204863.A patent/NL155979B/en not_active IP Right Cessation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2007073521A (en) *	2005-09-05	2007-03-22	Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh	Electrically-charged particle beam irradiation device and method for operating it
JP2009117394A (en) *	2005-09-05	2009-05-28	Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh	Charged particle beam irradiating device, and method for operating charged particle beam irradiating device

Also Published As

Publication number	Publication date
NL7204863A (en)	1972-10-16
US3786268A (en)	1974-01-15
DE2217660A1 (en)	1972-11-16
NL155979B (en)	1978-02-15

Publication	Publication Date	Title
JPS5323663B1 (en)	1978-07-15
ATA136472A (en)	1973-12-15
AR196074A1 (en)	1973-11-30
AU3005371A (en)	1972-12-21
AU2485671A (en)	1972-08-03
AU2894671A (en)	1972-11-23
AU2941471A (en)	1972-11-30
AU2952271A (en)	1972-12-07
AU2907471A (en)	1972-11-23
AU2938071A (en)	1972-11-30
AU2755871A (en)	1972-10-19
AU2486471A (en)	1972-08-03
AU2456871A (en)	1972-08-17
AU2836771A (en)	1972-11-09
AU2473671A (en)	1972-08-03
AU3038671A (en)	1973-01-04
AU3025871A (en)	1973-01-04
AU2837671A (en)	1972-11-09
AU2963771A (en)	1972-12-07
AU2724971A (en)	1972-10-05
AU2854371A (en)	1972-11-09
AU2875571A (en)	1972-11-16
AR192311Q (en)	1973-02-14
AU2880771A (en)	1972-11-16
AU2706571A (en)	1971-07-15