JPS5323276A - Pattern flaws detector - Google Patents

Pattern flaws detector

Info

Publication number
JPS5323276A
JPS5323276A JP9735576A JP9735576A JPS5323276A JP S5323276 A JPS5323276 A JP S5323276A JP 9735576 A JP9735576 A JP 9735576A JP 9735576 A JP9735576 A JP 9735576A JP S5323276 A JPS5323276 A JP S5323276A
Authority
JP
Japan
Prior art keywords
detector
flaws
pattern
pattern flaws
speedily
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9735576A
Other languages
Japanese (ja)
Inventor
Takayasu Ito
Shuichi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9735576A priority Critical patent/JPS5323276A/en
Publication of JPS5323276A publication Critical patent/JPS5323276A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To improve on the precision and speed of detection of input pattern's flaws by speedily extracting directional values in the boundary region of input patterns by the use of a parallel operational circuit.
COPYRIGHT: (C)1978,JPO&Japio
JP9735576A 1976-08-13 1976-08-13 Pattern flaws detector Pending JPS5323276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9735576A JPS5323276A (en) 1976-08-13 1976-08-13 Pattern flaws detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9735576A JPS5323276A (en) 1976-08-13 1976-08-13 Pattern flaws detector

Publications (1)

Publication Number Publication Date
JPS5323276A true JPS5323276A (en) 1978-03-03

Family

ID=14190173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9735576A Pending JPS5323276A (en) 1976-08-13 1976-08-13 Pattern flaws detector

Country Status (1)

Country Link
JP (1) JPS5323276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618423A (en) * 1979-07-24 1981-02-21 Fujitsu Ltd Method for detecting photomask pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618423A (en) * 1979-07-24 1981-02-21 Fujitsu Ltd Method for detecting photomask pattern

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