JPS5323276A - Pattern flaws detector - Google Patents
Pattern flaws detectorInfo
- Publication number
- JPS5323276A JPS5323276A JP9735576A JP9735576A JPS5323276A JP S5323276 A JPS5323276 A JP S5323276A JP 9735576 A JP9735576 A JP 9735576A JP 9735576 A JP9735576 A JP 9735576A JP S5323276 A JPS5323276 A JP S5323276A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- flaws
- pattern
- pattern flaws
- speedily
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To improve on the precision and speed of detection of input pattern's flaws by speedily extracting directional values in the boundary region of input patterns by the use of a parallel operational circuit.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9735576A JPS5323276A (en) | 1976-08-13 | 1976-08-13 | Pattern flaws detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9735576A JPS5323276A (en) | 1976-08-13 | 1976-08-13 | Pattern flaws detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5323276A true JPS5323276A (en) | 1978-03-03 |
Family
ID=14190173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9735576A Pending JPS5323276A (en) | 1976-08-13 | 1976-08-13 | Pattern flaws detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5323276A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5618423A (en) * | 1979-07-24 | 1981-02-21 | Fujitsu Ltd | Method for detecting photomask pattern |
-
1976
- 1976-08-13 JP JP9735576A patent/JPS5323276A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5618423A (en) * | 1979-07-24 | 1981-02-21 | Fujitsu Ltd | Method for detecting photomask pattern |
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