JPS5323267A - Differential exhausting vacuum chamber - Google Patents
Differential exhausting vacuum chamberInfo
- Publication number
- JPS5323267A JPS5323267A JP9710176A JP9710176A JPS5323267A JP S5323267 A JPS5323267 A JP S5323267A JP 9710176 A JP9710176 A JP 9710176A JP 9710176 A JP9710176 A JP 9710176A JP S5323267 A JPS5323267 A JP S5323267A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- exhausting vacuum
- differential exhausting
- differential
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: A differential exhausting vacuum chamber is partitioned by using iris plates having a small aperture into the same number of small chambers as that of pump-exhaust tubes provided to the circumference, and small chambers are made correspond to pumps, thereby improving the unit.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9710176A JPS5323267A (en) | 1976-08-16 | 1976-08-16 | Differential exhausting vacuum chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9710176A JPS5323267A (en) | 1976-08-16 | 1976-08-16 | Differential exhausting vacuum chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5323267A true JPS5323267A (en) | 1978-03-03 |
Family
ID=14183213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9710176A Pending JPS5323267A (en) | 1976-08-16 | 1976-08-16 | Differential exhausting vacuum chamber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5323267A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109648A (en) * | 1987-10-21 | 1989-04-26 | Nec Corp | Beam plasma type ion gun |
WO2008054093A1 (en) * | 2006-10-31 | 2008-05-08 | Korean Basic Science Institute | 3-dimensional differential pumping system and method thereof |
-
1976
- 1976-08-16 JP JP9710176A patent/JPS5323267A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109648A (en) * | 1987-10-21 | 1989-04-26 | Nec Corp | Beam plasma type ion gun |
WO2008054093A1 (en) * | 2006-10-31 | 2008-05-08 | Korean Basic Science Institute | 3-dimensional differential pumping system and method thereof |
KR100852953B1 (en) | 2006-10-31 | 2008-08-19 | 한국기초과학지원연구원 | A solid differential pumping system and a method thereof |
US7755039B2 (en) | 2006-10-31 | 2010-07-13 | Korea Basic Science Institute | 3-dimensional differential pumping system and method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5323267A (en) | Differential exhausting vacuum chamber | |
JPS5214202A (en) | Mechanical fuel pump | |
JPS5240854A (en) | High frequency heating unit | |
JPS5231891A (en) | Method of manufacturing novel anti-tumor antibiotics, vi-7501 | |
JPS51151062A (en) | Electron tube | |
JPS51113215A (en) | Piston type accumulater. | |
JPS5358810A (en) | High vacuum pump | |
JPS5317058A (en) | Gas discharge panel | |
JPS5289835A (en) | Liquid fuel vapor preheat combustor | |
JPS5416708A (en) | Low noize fan | |
JPS51147008A (en) | Discharge pressure fluctuation proof fin system for centrifugal fan | |
JPS5411717A (en) | Active coupler | |
JPS5267842A (en) | High frequency heater | |
JPS5267843A (en) | High frequency heater | |
JPS5279759A (en) | Multi-stage accelerating tube | |
JPS5399642A (en) | Range hood | |
JPS51128581A (en) | Diaphragm type pressure element | |
JPS51142972A (en) | Manufacturing method of discharge display panel | |
JPS51139765A (en) | Method of manufacturing secondary electron multiplication channel plate | |
JPS5346262A (en) | Manufacture for magnetron | |
JPS5290805A (en) | Attenuator of low frequency air pressure wave | |
JPS5218509A (en) | Construction of discharge port of rotary engine | |
JPS52102970A (en) | Master cylinder | |
JPS5354967A (en) | Discharge display unit and its manufacture | |
JPS51132078A (en) | Bulb inside cleane in the manufacturing process of cathode beam tube |