JPS5322168A - Apparatus and process for ionic plating of hottcathode discharge type - Google Patents
Apparatus and process for ionic plating of hottcathode discharge typeInfo
- Publication number
- JPS5322168A JPS5322168A JP9626276A JP9626276A JPS5322168A JP S5322168 A JPS5322168 A JP S5322168A JP 9626276 A JP9626276 A JP 9626276A JP 9626276 A JP9626276 A JP 9626276A JP S5322168 A JPS5322168 A JP S5322168A
- Authority
- JP
- Japan
- Prior art keywords
- hottcathode
- discharge type
- ionic plating
- plating
- ionic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9626276A JPS5322168A (en) | 1976-08-12 | 1976-08-12 | Apparatus and process for ionic plating of hottcathode discharge type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9626276A JPS5322168A (en) | 1976-08-12 | 1976-08-12 | Apparatus and process for ionic plating of hottcathode discharge type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5322168A true JPS5322168A (en) | 1978-03-01 |
Family
ID=14160249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9626276A Pending JPS5322168A (en) | 1976-08-12 | 1976-08-12 | Apparatus and process for ionic plating of hottcathode discharge type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5322168A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55168034U (en) * | 1979-05-21 | 1980-12-03 | ||
JPS56112569A (en) * | 1980-02-12 | 1981-09-04 | Toray Industries | Production of polyamide hollow fiber |
JPS5913067A (en) * | 1982-07-13 | 1984-01-23 | Matsushita Electric Ind Co Ltd | Formation of thin film |
JPS6179760A (en) * | 1984-09-27 | 1986-04-23 | Shizuokaken | Formation of aluminum oxide film by activated reactive ion plating |
-
1976
- 1976-08-12 JP JP9626276A patent/JPS5322168A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55168034U (en) * | 1979-05-21 | 1980-12-03 | ||
JPS56112569A (en) * | 1980-02-12 | 1981-09-04 | Toray Industries | Production of polyamide hollow fiber |
JPS5913067A (en) * | 1982-07-13 | 1984-01-23 | Matsushita Electric Ind Co Ltd | Formation of thin film |
JPH0138871B2 (en) * | 1982-07-13 | 1989-08-16 | Matsushita Electric Ind Co Ltd | |
JPS6179760A (en) * | 1984-09-27 | 1986-04-23 | Shizuokaken | Formation of aluminum oxide film by activated reactive ion plating |
JPS633021B2 (en) * | 1984-09-27 | 1988-01-21 | Shizuokaken |
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