JPS532080A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS532080A
JPS532080A JP7622676A JP7622676A JPS532080A JP S532080 A JPS532080 A JP S532080A JP 7622676 A JP7622676 A JP 7622676A JP 7622676 A JP7622676 A JP 7622676A JP S532080 A JPS532080 A JP S532080A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
outer circumference
inclinatio
giving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7622676A
Other languages
Japanese (ja)
Inventor
Masaru Asano
Takashi Suzuki
Tetsutada Sakurai
Yoshio Haruhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7622676A priority Critical patent/JPS532080A/en
Publication of JPS532080A publication Critical patent/JPS532080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent an increase of the film thickness when a rotary application is carried out, by giving an inclinatio of under 20° to the outer circumference of the substrate main surface against the surface other than the outer circumference.
COPYRIGHT: (C)1978,JPO&Japio
JP7622676A 1976-06-28 1976-06-28 Manufacture of semiconductor Pending JPS532080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7622676A JPS532080A (en) 1976-06-28 1976-06-28 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7622676A JPS532080A (en) 1976-06-28 1976-06-28 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS532080A true JPS532080A (en) 1978-01-10

Family

ID=13599251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7622676A Pending JPS532080A (en) 1976-06-28 1976-06-28 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS532080A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS452308Y1 (en) * 1965-12-28 1970-01-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS452308Y1 (en) * 1965-12-28 1970-01-30

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