JPS532080A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS532080A JPS532080A JP7622676A JP7622676A JPS532080A JP S532080 A JPS532080 A JP S532080A JP 7622676 A JP7622676 A JP 7622676A JP 7622676 A JP7622676 A JP 7622676A JP S532080 A JPS532080 A JP S532080A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- outer circumference
- inclinatio
- giving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To prevent an increase of the film thickness when a rotary application is carried out, by giving an inclinatio of under 20° to the outer circumference of the substrate main surface against the surface other than the outer circumference.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7622676A JPS532080A (en) | 1976-06-28 | 1976-06-28 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7622676A JPS532080A (en) | 1976-06-28 | 1976-06-28 | Manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS532080A true JPS532080A (en) | 1978-01-10 |
Family
ID=13599251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7622676A Pending JPS532080A (en) | 1976-06-28 | 1976-06-28 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS532080A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS452308Y1 (en) * | 1965-12-28 | 1970-01-30 |
-
1976
- 1976-06-28 JP JP7622676A patent/JPS532080A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS452308Y1 (en) * | 1965-12-28 | 1970-01-30 |
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