JPS5319764A - Mark detection system in electron beam exposure - Google Patents
Mark detection system in electron beam exposureInfo
- Publication number
- JPS5319764A JPS5319764A JP9404776A JP9404776A JPS5319764A JP S5319764 A JPS5319764 A JP S5319764A JP 9404776 A JP9404776 A JP 9404776A JP 9404776 A JP9404776 A JP 9404776A JP S5319764 A JPS5319764 A JP S5319764A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detection system
- beam exposure
- mark detection
- mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To precisely detect the central position of a mark by making use of a signal obtained from a mark providing a position standard, which is formed by selective etching of silicon, regardless of an increase or decrease in the width of the mark passed through the device process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319764A true JPS5319764A (en) | 1978-02-23 |
JPS5346694B2 JPS5346694B2 (en) | 1978-12-15 |
Family
ID=14099638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9404776A Granted JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5319764A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162837A (en) * | 1980-05-20 | 1981-12-15 | Nec Corp | Electron beam exposure device |
JPS5783175A (en) * | 1980-11-12 | 1982-05-24 | Mitsubishi Electric Corp | Phase rotation change-over device for inverter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (en) * | 1973-06-08 | 1975-03-14 |
-
1976
- 1976-08-09 JP JP9404776A patent/JPS5319764A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (en) * | 1973-06-08 | 1975-03-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162837A (en) * | 1980-05-20 | 1981-12-15 | Nec Corp | Electron beam exposure device |
JPS5783175A (en) * | 1980-11-12 | 1982-05-24 | Mitsubishi Electric Corp | Phase rotation change-over device for inverter |
Also Published As
Publication number | Publication date |
---|---|
JPS5346694B2 (en) | 1978-12-15 |
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