JPS5315236B2 - - Google Patents

Info

Publication number
JPS5315236B2
JPS5315236B2 JP10470473A JP10470473A JPS5315236B2 JP S5315236 B2 JPS5315236 B2 JP S5315236B2 JP 10470473 A JP10470473 A JP 10470473A JP 10470473 A JP10470473 A JP 10470473A JP S5315236 B2 JPS5315236 B2 JP S5315236B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10470473A
Other languages
Japanese (ja)
Other versions
JPS5054994A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10470473A priority Critical patent/JPS5315236B2/ja
Publication of JPS5054994A publication Critical patent/JPS5054994A/ja
Publication of JPS5315236B2 publication Critical patent/JPS5315236B2/ja
Expired legal-status Critical Current

Links

JP10470473A 1973-09-17 1973-09-17 Expired JPS5315236B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10470473A JPS5315236B2 (en) 1973-09-17 1973-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10470473A JPS5315236B2 (en) 1973-09-17 1973-09-17

Publications (2)

Publication Number Publication Date
JPS5054994A JPS5054994A (en) 1975-05-14
JPS5315236B2 true JPS5315236B2 (en) 1978-05-23

Family

ID=14387857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10470473A Expired JPS5315236B2 (en) 1973-09-17 1973-09-17

Country Status (1)

Country Link
JP (1) JPS5315236B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100246963B1 (en) * 1996-11-22 2000-03-15 윤종용 Stage for wafer holdring of semiconductor device manufacturing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851066A (en) * 1981-09-17 1983-03-25 Tipton Mfg Corp Entirely automatic cylindrical barrel polishing machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100246963B1 (en) * 1996-11-22 2000-03-15 윤종용 Stage for wafer holdring of semiconductor device manufacturing apparatus

Also Published As

Publication number Publication date
JPS5054994A (en) 1975-05-14

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