JPS53140707U - - Google Patents

Info

Publication number
JPS53140707U
JPS53140707U JP4400677U JP4400677U JPS53140707U JP S53140707 U JPS53140707 U JP S53140707U JP 4400677 U JP4400677 U JP 4400677U JP 4400677 U JP4400677 U JP 4400677U JP S53140707 U JPS53140707 U JP S53140707U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4400677U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4400677U priority Critical patent/JPS53140707U/ja
Publication of JPS53140707U publication Critical patent/JPS53140707U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP4400677U 1977-04-11 1977-04-11 Pending JPS53140707U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4400677U JPS53140707U (en) 1977-04-11 1977-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4400677U JPS53140707U (en) 1977-04-11 1977-04-11

Publications (1)

Publication Number Publication Date
JPS53140707U true JPS53140707U (en) 1978-11-07

Family

ID=28919502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4400677U Pending JPS53140707U (en) 1977-04-11 1977-04-11

Country Status (1)

Country Link
JP (1) JPS53140707U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020096061A (en) * 2018-12-12 2020-06-18 株式会社Ｓｃｒｅｅｎホールディングス Processing chamber and substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504010B1 (en) * 1969-06-19 1975-02-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504010B1 (en) * 1969-06-19 1975-02-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020096061A (en) * 2018-12-12 2020-06-18 株式会社Ｓｃｒｅｅｎホールディングス Processing chamber and substrate processing apparatus

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