JPS53130979A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53130979A JPS53130979A JP4616977A JP4616977A JPS53130979A JP S53130979 A JPS53130979 A JP S53130979A JP 4616977 A JP4616977 A JP 4616977A JP 4616977 A JP4616977 A JP 4616977A JP S53130979 A JPS53130979 A JP S53130979A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- forming
- sio
- reliability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To manufacture a device excellent in electric performance and reliability, by forming a SiO2 thin film including phosphorus at the back of a substrate with CVD method, and forming a strain layer with heat treatment and also performing getting.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4616977A JPS53130979A (en) | 1977-04-20 | 1977-04-20 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4616977A JPS53130979A (en) | 1977-04-20 | 1977-04-20 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53130979A true JPS53130979A (en) | 1978-11-15 |
Family
ID=12739510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4616977A Pending JPS53130979A (en) | 1977-04-20 | 1977-04-20 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53130979A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57193039A (en) * | 1981-05-22 | 1982-11-27 | Sony Corp | Manufacture of semiconductor device |
US8329563B2 (en) | 2006-02-24 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a gettering layer and manufacturing method therefor |
-
1977
- 1977-04-20 JP JP4616977A patent/JPS53130979A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57193039A (en) * | 1981-05-22 | 1982-11-27 | Sony Corp | Manufacture of semiconductor device |
JPH0542134B2 (en) * | 1981-05-22 | 1993-06-25 | Sony Corp | |
US8329563B2 (en) | 2006-02-24 | 2012-12-11 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a gettering layer and manufacturing method therefor |
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