JPS53121458A - Manufacture for semiconductor element - Google Patents

Manufacture for semiconductor element

Info

Publication number
JPS53121458A
JPS53121458A JP3536077A JP3536077A JPS53121458A JP S53121458 A JPS53121458 A JP S53121458A JP 3536077 A JP3536077 A JP 3536077A JP 3536077 A JP3536077 A JP 3536077A JP S53121458 A JPS53121458 A JP S53121458A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor element
dicing
alkali
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3536077A
Other languages
Japanese (ja)
Other versions
JPS6038871B2 (en
Inventor
Junichiro Horiuchi
Tatsuo Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52035360A priority Critical patent/JPS6038871B2/en
Publication of JPS53121458A publication Critical patent/JPS53121458A/en
Publication of JPS6038871B2 publication Critical patent/JPS6038871B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)

Abstract

PURPOSE: To remove scrap after dicing with water without using acid or alkali.
COPYRIGHT: (C)1978,JPO&Japio
JP52035360A 1977-03-31 1977-03-31 Method for manufacturing semiconductor devices Expired JPS6038871B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52035360A JPS6038871B2 (en) 1977-03-31 1977-03-31 Method for manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52035360A JPS6038871B2 (en) 1977-03-31 1977-03-31 Method for manufacturing semiconductor devices

Publications (2)

Publication Number Publication Date
JPS53121458A true JPS53121458A (en) 1978-10-23
JPS6038871B2 JPS6038871B2 (en) 1985-09-03

Family

ID=12439707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52035360A Expired JPS6038871B2 (en) 1977-03-31 1977-03-31 Method for manufacturing semiconductor devices

Country Status (1)

Country Link
JP (1) JPS6038871B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8580656B2 (en) 2008-07-14 2013-11-12 Air Products And Chemicals, Inc. Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor
US8883701B2 (en) 2010-07-09 2014-11-11 Air Products And Chemicals, Inc. Method for wafer dicing and composition useful thereof

Also Published As

Publication number Publication date
JPS6038871B2 (en) 1985-09-03

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