JPS53121295A - Laser machining equipment - Google Patents

Laser machining equipment

Info

Publication number
JPS53121295A
JPS53121295A JP3457477A JP3457477A JPS53121295A JP S53121295 A JPS53121295 A JP S53121295A JP 3457477 A JP3457477 A JP 3457477A JP 3457477 A JP3457477 A JP 3457477A JP S53121295 A JPS53121295 A JP S53121295A
Authority
JP
Japan
Prior art keywords
laser machining
machining equipment
lens
align
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3457477A
Other languages
Japanese (ja)
Other versions
JPS5933076B2 (en
Inventor
Mikio Hongo
Takeoki Miyauchi
Katsuro Mizukoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52034574A priority Critical patent/JPS5933076B2/en
Publication of JPS53121295A publication Critical patent/JPS53121295A/en
Publication of JPS5933076B2 publication Critical patent/JPS5933076B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE: To align the focus of a condensing lens with the surface of a work by detecting a shift of the surface along the laser axis based on the inductance change due to eddy current generating on the surface or the change in the capacitance between the lens and the surface.
COPYRIGHT: (C)1978,JPO&Japio
JP52034574A 1977-03-30 1977-03-30 Laser processing equipment Expired JPS5933076B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52034574A JPS5933076B2 (en) 1977-03-30 1977-03-30 Laser processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52034574A JPS5933076B2 (en) 1977-03-30 1977-03-30 Laser processing equipment

Publications (2)

Publication Number Publication Date
JPS53121295A true JPS53121295A (en) 1978-10-23
JPS5933076B2 JPS5933076B2 (en) 1984-08-13

Family

ID=12418086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52034574A Expired JPS5933076B2 (en) 1977-03-30 1977-03-30 Laser processing equipment

Country Status (1)

Country Link
JP (1) JPS5933076B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159286A (en) * 1981-03-27 1982-10-01 Mitsubishi Electric Corp Laser working device
JPS57159285A (en) * 1981-03-27 1982-10-01 Mitsubishi Electric Corp Laser working device
JPS59193783A (en) * 1983-04-18 1984-11-02 Mitsubishi Electric Corp Pipe cutter
JPS59223189A (en) * 1983-06-03 1984-12-14 Mitsubishi Heavy Ind Ltd Laser working device
JPS6011185U (en) * 1983-06-28 1985-01-25 株式会社　アマダ Processing head nozzle lifting device
JPS60171684U (en) * 1984-04-20 1985-11-14 三洋電機株式会社 Laser processing equipment
JPS6267690U (en) * 1985-10-18 1987-04-27
JP2012151434A (en) * 2011-01-20 2012-08-09 Lts Co Ltd Selective emitter manufacturing apparatus of solar cell using laser

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105223A (en) * 1982-12-07 1984-06-18 キヤノン株式会社 Input/output device
JPH0325816A (en) * 1989-06-23 1991-02-04 Sony Corp Lighting system for switch operating button
JPH0366127U (en) * 1989-10-31 1991-06-27

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159286A (en) * 1981-03-27 1982-10-01 Mitsubishi Electric Corp Laser working device
JPS57159285A (en) * 1981-03-27 1982-10-01 Mitsubishi Electric Corp Laser working device
JPS59193783A (en) * 1983-04-18 1984-11-02 Mitsubishi Electric Corp Pipe cutter
JPH0234276B2 (en) * 1983-04-18 1990-08-02 Mitsubishi Electric Corp
JPS59223189A (en) * 1983-06-03 1984-12-14 Mitsubishi Heavy Ind Ltd Laser working device
JPS6011185U (en) * 1983-06-28 1985-01-25 株式会社　アマダ Processing head nozzle lifting device
JPS6313913Y2 (en) * 1983-06-28 1988-04-19
JPS60171684U (en) * 1984-04-20 1985-11-14 三洋電機株式会社 Laser processing equipment
JPS6267690U (en) * 1985-10-18 1987-04-27
JP2012151434A (en) * 2011-01-20 2012-08-09 Lts Co Ltd Selective emitter manufacturing apparatus of solar cell using laser

Also Published As

Publication number Publication date
JPS5933076B2 (en) 1984-08-13

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