JPS53120257A - Scan-type electronic microscope - Google Patents

Scan-type electronic microscope

Info

Publication number
JPS53120257A
JPS53120257A JP3447677A JP3447677A JPS53120257A JP S53120257 A JPS53120257 A JP S53120257A JP 3447677 A JP3447677 A JP 3447677A JP 3447677 A JP3447677 A JP 3447677A JP S53120257 A JPS53120257 A JP S53120257A
Authority
JP
Japan
Prior art keywords
scan
type electronic
electronic microscope
sample
sample mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3447677A
Other languages
Japanese (ja)
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3447677A priority Critical patent/JPS53120257A/en
Publication of JPS53120257A publication Critical patent/JPS53120257A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE: To obtain a scan-type electronic microscope applicable for a heavy and large-size test sample through simplification of the structure of the sample mount, by sharing part of the sample mount function, i.e., the variation of the inclination and the working distance to the structure of the lens barrel.
COPYRIGHT: (C)1978,JPO&Japio
JP3447677A 1977-03-30 1977-03-30 Scan-type electronic microscope Pending JPS53120257A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3447677A JPS53120257A (en) 1977-03-30 1977-03-30 Scan-type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3447677A JPS53120257A (en) 1977-03-30 1977-03-30 Scan-type electronic microscope

Publications (1)

Publication Number Publication Date
JPS53120257A true JPS53120257A (en) 1978-10-20

Family

ID=12415295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3447677A Pending JPS53120257A (en) 1977-03-30 1977-03-30 Scan-type electronic microscope

Country Status (1)

Country Link
JP (1) JPS53120257A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132657A (en) * 1981-02-06 1982-08-17 Akashi Seisakusho Co Ltd Inclined moving body tube type scanning electron microscope and its similar apparatus
JPS58106228U (en) * 1982-01-16 1983-07-19 日産自動車株式会社 Vehicle axle structure
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132657A (en) * 1981-02-06 1982-08-17 Akashi Seisakusho Co Ltd Inclined moving body tube type scanning electron microscope and its similar apparatus
JPS58106228U (en) * 1982-01-16 1983-07-19 日産自動車株式会社 Vehicle axle structure
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

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