JPS53120257A - Scan-type electronic microscope - Google Patents
Scan-type electronic microscopeInfo
- Publication number
- JPS53120257A JPS53120257A JP3447677A JP3447677A JPS53120257A JP S53120257 A JPS53120257 A JP S53120257A JP 3447677 A JP3447677 A JP 3447677A JP 3447677 A JP3447677 A JP 3447677A JP S53120257 A JPS53120257 A JP S53120257A
- Authority
- JP
- Japan
- Prior art keywords
- scan
- type electronic
- electronic microscope
- sample
- sample mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
PURPOSE: To obtain a scan-type electronic microscope applicable for a heavy and large-size test sample through simplification of the structure of the sample mount, by sharing part of the sample mount function, i.e., the variation of the inclination and the working distance to the structure of the lens barrel.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3447677A JPS53120257A (en) | 1977-03-30 | 1977-03-30 | Scan-type electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3447677A JPS53120257A (en) | 1977-03-30 | 1977-03-30 | Scan-type electronic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53120257A true JPS53120257A (en) | 1978-10-20 |
Family
ID=12415295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3447677A Pending JPS53120257A (en) | 1977-03-30 | 1977-03-30 | Scan-type electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120257A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132657A (en) * | 1981-02-06 | 1982-08-17 | Akashi Seisakusho Co Ltd | Inclined moving body tube type scanning electron microscope and its similar apparatus |
JPS58106228U (en) * | 1982-01-16 | 1983-07-19 | 日産自動車株式会社 | Vehicle axle structure |
JPS60136048U (en) * | 1984-12-27 | 1985-09-10 | 三菱重工業株式会社 | scanning electron microscope equipment |
-
1977
- 1977-03-30 JP JP3447677A patent/JPS53120257A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132657A (en) * | 1981-02-06 | 1982-08-17 | Akashi Seisakusho Co Ltd | Inclined moving body tube type scanning electron microscope and its similar apparatus |
JPS58106228U (en) * | 1982-01-16 | 1983-07-19 | 日産自動車株式会社 | Vehicle axle structure |
JPS60136048U (en) * | 1984-12-27 | 1985-09-10 | 三菱重工業株式会社 | scanning electron microscope equipment |
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