JPS53115499A - Charged particle device - Google Patents
Charged particle deviceInfo
- Publication number
- JPS53115499A JPS53115499A JP1586477A JP1586477A JPS53115499A JP S53115499 A JPS53115499 A JP S53115499A JP 1586477 A JP1586477 A JP 1586477A JP 1586477 A JP1586477 A JP 1586477A JP S53115499 A JPS53115499 A JP S53115499A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle device
- electric potential
- earth
- giving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To prevent the cause of surge voltage in giving the same electric potential in connecting the core, connected with the electrode which is most closely located to the earth electric potential element among non-earth electrodes of charged particle generator, with the inner shield.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52015864A JPS593040B2 (en) | 1977-02-15 | 1977-02-15 | charged particle device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52015864A JPS593040B2 (en) | 1977-02-15 | 1977-02-15 | charged particle device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53115499A true JPS53115499A (en) | 1978-10-07 |
JPS593040B2 JPS593040B2 (en) | 1984-01-21 |
Family
ID=11900655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52015864A Expired JPS593040B2 (en) | 1977-02-15 | 1977-02-15 | charged particle device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593040B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2021117226A1 (en) * | 2019-12-13 | 2021-06-17 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6089443U (en) * | 1983-11-25 | 1985-06-19 | 三菱自動車工業株式会社 | damper device |
-
1977
- 1977-02-15 JP JP52015864A patent/JPS593040B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2021117226A1 (en) * | 2019-12-13 | 2021-06-17 | ||
WO2021117226A1 (en) * | 2019-12-13 | 2021-06-17 | 株式会社日立ハイテク | Charged particle gun and charged particle beam device |
GB2605035A (en) * | 2019-12-13 | 2022-09-21 | Hitachi High Tech Corp | Charged particle gun and charged particle beam device |
GB2605035B (en) * | 2019-12-13 | 2024-01-31 | Hitachi High Tech Corp | Charged particle gun and charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
JPS593040B2 (en) | 1984-01-21 |
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