JPS53115499A - Charged particle device - Google Patents

Charged particle device

Info

Publication number
JPS53115499A
JPS53115499A JP1586477A JP1586477A JPS53115499A JP S53115499 A JPS53115499 A JP S53115499A JP 1586477 A JP1586477 A JP 1586477A JP 1586477 A JP1586477 A JP 1586477A JP S53115499 A JPS53115499 A JP S53115499A
Authority
JP
Japan
Prior art keywords
charged particle
particle device
electric potential
earth
giving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1586477A
Other languages
Japanese (ja)
Other versions
JPS593040B2 (en
Inventor
Masashi Yasunaga
Zenji Kamiyama
Fumiharu Yabunaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP52015864A priority Critical patent/JPS593040B2/en
Publication of JPS53115499A publication Critical patent/JPS53115499A/en
Publication of JPS593040B2 publication Critical patent/JPS593040B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To prevent the cause of surge voltage in giving the same electric potential in connecting the core, connected with the electrode which is most closely located to the earth electric potential element among non-earth electrodes of charged particle generator, with the inner shield.
COPYRIGHT: (C)1978,JPO&Japio
JP52015864A 1977-02-15 1977-02-15 charged particle device Expired JPS593040B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52015864A JPS593040B2 (en) 1977-02-15 1977-02-15 charged particle device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52015864A JPS593040B2 (en) 1977-02-15 1977-02-15 charged particle device

Publications (2)

Publication Number Publication Date
JPS53115499A true JPS53115499A (en) 1978-10-07
JPS593040B2 JPS593040B2 (en) 1984-01-21

Family

ID=11900655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52015864A Expired JPS593040B2 (en) 1977-02-15 1977-02-15 charged particle device

Country Status (1)

Country Link
JP (1) JPS593040B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021117226A1 (en) * 2019-12-13 2021-06-17

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089443U (en) * 1983-11-25 1985-06-19 三菱自動車工業株式会社 damper device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021117226A1 (en) * 2019-12-13 2021-06-17
WO2021117226A1 (en) * 2019-12-13 2021-06-17 株式会社日立ハイテク Charged particle gun and charged particle beam device
GB2605035A (en) * 2019-12-13 2022-09-21 Hitachi High Tech Corp Charged particle gun and charged particle beam device
GB2605035B (en) * 2019-12-13 2024-01-31 Hitachi High Tech Corp Charged particle gun and charged particle beam device

Also Published As

Publication number Publication date
JPS593040B2 (en) 1984-01-21

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