JPS53113279A - Control method for semiconductor monocrystal manufacturing apparatus - Google Patents
Control method for semiconductor monocrystal manufacturing apparatusInfo
- Publication number
- JPS53113279A JPS53113279A JP2842677A JP2842677A JPS53113279A JP S53113279 A JPS53113279 A JP S53113279A JP 2842677 A JP2842677 A JP 2842677A JP 2842677 A JP2842677 A JP 2842677A JP S53113279 A JPS53113279 A JP S53113279A
- Authority
- JP
- Japan
- Prior art keywords
- control method
- manufacturing apparatus
- semiconductor monocrystal
- monocrystal manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2842677A JPS53113279A (en) | 1977-03-14 | 1977-03-14 | Control method for semiconductor monocrystal manufacturing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2842677A JPS53113279A (en) | 1977-03-14 | 1977-03-14 | Control method for semiconductor monocrystal manufacturing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53113279A true JPS53113279A (en) | 1978-10-03 |
Family
ID=12248322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2842677A Pending JPS53113279A (en) | 1977-03-14 | 1977-03-14 | Control method for semiconductor monocrystal manufacturing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53113279A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012001386A (en) * | 2010-06-16 | 2012-01-05 | Shin Etsu Handotai Co Ltd | Single crystal production apparatus and method for detecting leakage of melt |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975467A (en) * | 1972-11-21 | 1974-07-22 | ||
JPS5090580A (en) * | 1973-12-12 | 1975-07-19 | ||
JPS514965A (en) * | 1974-03-29 | 1976-01-16 | Nat Res Dev |
-
1977
- 1977-03-14 JP JP2842677A patent/JPS53113279A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4975467A (en) * | 1972-11-21 | 1974-07-22 | ||
JPS5090580A (en) * | 1973-12-12 | 1975-07-19 | ||
JPS514965A (en) * | 1974-03-29 | 1976-01-16 | Nat Res Dev |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012001386A (en) * | 2010-06-16 | 2012-01-05 | Shin Etsu Handotai Co Ltd | Single crystal production apparatus and method for detecting leakage of melt |
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