JPS53113279A - Control method for semiconductor monocrystal manufacturing apparatus - Google Patents

Control method for semiconductor monocrystal manufacturing apparatus

Info

Publication number
JPS53113279A
JPS53113279A JP2842677A JP2842677A JPS53113279A JP S53113279 A JPS53113279 A JP S53113279A JP 2842677 A JP2842677 A JP 2842677A JP 2842677 A JP2842677 A JP 2842677A JP S53113279 A JPS53113279 A JP S53113279A
Authority
JP
Japan
Prior art keywords
control method
manufacturing apparatus
semiconductor monocrystal
monocrystal manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2842677A
Other languages
Japanese (ja)
Inventor
Tsukasa Yasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP2842677A priority Critical patent/JPS53113279A/en
Publication of JPS53113279A publication Critical patent/JPS53113279A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2842677A 1977-03-14 1977-03-14 Control method for semiconductor monocrystal manufacturing apparatus Pending JPS53113279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2842677A JPS53113279A (en) 1977-03-14 1977-03-14 Control method for semiconductor monocrystal manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2842677A JPS53113279A (en) 1977-03-14 1977-03-14 Control method for semiconductor monocrystal manufacturing apparatus

Publications (1)

Publication Number Publication Date
JPS53113279A true JPS53113279A (en) 1978-10-03

Family

ID=12248322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2842677A Pending JPS53113279A (en) 1977-03-14 1977-03-14 Control method for semiconductor monocrystal manufacturing apparatus

Country Status (1)

Country Link
JP (1) JPS53113279A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012001386A (en) * 2010-06-16 2012-01-05 Shin Etsu Handotai Co Ltd Single crystal production apparatus and method for detecting leakage of melt

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975467A (en) * 1972-11-21 1974-07-22
JPS5090580A (en) * 1973-12-12 1975-07-19
JPS514965A (en) * 1974-03-29 1976-01-16 Nat Res Dev

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4975467A (en) * 1972-11-21 1974-07-22
JPS5090580A (en) * 1973-12-12 1975-07-19
JPS514965A (en) * 1974-03-29 1976-01-16 Nat Res Dev

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012001386A (en) * 2010-06-16 2012-01-05 Shin Etsu Handotai Co Ltd Single crystal production apparatus and method for detecting leakage of melt

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