JPS53112497A - Method of monitoring ion working for piezooelectric wafer - Google Patents

Method of monitoring ion working for piezooelectric wafer

Info

Publication number
JPS53112497A
JPS53112497A JP2584377A JP2584377A JPS53112497A JP S53112497 A JPS53112497 A JP S53112497A JP 2584377 A JP2584377 A JP 2584377A JP 2584377 A JP2584377 A JP 2584377A JP S53112497 A JPS53112497 A JP S53112497A
Authority
JP
Japan
Prior art keywords
piezooelectric
wafer
monitoring ion
ion working
working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2584377A
Other languages
Japanese (ja)
Inventor
Dezorumieeru Perunaaru
Beruto Maruku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to JP2584377A priority Critical patent/JPS53112497A/en
Publication of JPS53112497A publication Critical patent/JPS53112497A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2584377A 1977-03-09 1977-03-09 Method of monitoring ion working for piezooelectric wafer Pending JPS53112497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2584377A JPS53112497A (en) 1977-03-09 1977-03-09 Method of monitoring ion working for piezooelectric wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2584377A JPS53112497A (en) 1977-03-09 1977-03-09 Method of monitoring ion working for piezooelectric wafer

Publications (1)

Publication Number Publication Date
JPS53112497A true JPS53112497A (en) 1978-09-30

Family

ID=12177122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2584377A Pending JPS53112497A (en) 1977-03-09 1977-03-09 Method of monitoring ion working for piezooelectric wafer

Country Status (1)

Country Link
JP (1) JPS53112497A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182133A (en) * 1983-01-03 1984-10-16 ロングフオ−ド・エクイツプメント・インタ−ナシヨナル・リミテツド Control of card feeder
JPS63151103A (en) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd Method and device for adjusting frequency of piezoelectric vibrator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182133A (en) * 1983-01-03 1984-10-16 ロングフオ−ド・エクイツプメント・インタ−ナシヨナル・リミテツド Control of card feeder
JPH0227254B2 (en) * 1983-01-03 1990-06-15 Rongufuoodo Ekuitsupumento Intern Ltd
JPS63151103A (en) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd Method and device for adjusting frequency of piezoelectric vibrator

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