JPS53112497A - Method of monitoring ion working for piezooelectric wafer - Google Patents
Method of monitoring ion working for piezooelectric waferInfo
- Publication number
- JPS53112497A JPS53112497A JP2584377A JP2584377A JPS53112497A JP S53112497 A JPS53112497 A JP S53112497A JP 2584377 A JP2584377 A JP 2584377A JP 2584377 A JP2584377 A JP 2584377A JP S53112497 A JPS53112497 A JP S53112497A
- Authority
- JP
- Japan
- Prior art keywords
- piezooelectric
- wafer
- monitoring ion
- ion working
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2584377A JPS53112497A (en) | 1977-03-09 | 1977-03-09 | Method of monitoring ion working for piezooelectric wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2584377A JPS53112497A (en) | 1977-03-09 | 1977-03-09 | Method of monitoring ion working for piezooelectric wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53112497A true JPS53112497A (en) | 1978-09-30 |
Family
ID=12177122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2584377A Pending JPS53112497A (en) | 1977-03-09 | 1977-03-09 | Method of monitoring ion working for piezooelectric wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53112497A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59182133A (en) * | 1983-01-03 | 1984-10-16 | ロングフオ−ド・エクイツプメント・インタ−ナシヨナル・リミテツド | Control of card feeder |
JPS63151103A (en) * | 1986-12-15 | 1988-06-23 | Nippon Dempa Kogyo Co Ltd | Method and device for adjusting frequency of piezoelectric vibrator |
-
1977
- 1977-03-09 JP JP2584377A patent/JPS53112497A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59182133A (en) * | 1983-01-03 | 1984-10-16 | ロングフオ−ド・エクイツプメント・インタ−ナシヨナル・リミテツド | Control of card feeder |
JPH0227254B2 (en) * | 1983-01-03 | 1990-06-15 | Rongufuoodo Ekuitsupumento Intern Ltd | |
JPS63151103A (en) * | 1986-12-15 | 1988-06-23 | Nippon Dempa Kogyo Co Ltd | Method and device for adjusting frequency of piezoelectric vibrator |
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