JPS5299079A - Production of vertical type field effect transistor - Google Patents

Production of vertical type field effect transistor

Info

Publication number
JPS5299079A
JPS5299079A JP1565376A JP1565376A JPS5299079A JP S5299079 A JPS5299079 A JP S5299079A JP 1565376 A JP1565376 A JP 1565376A JP 1565376 A JP1565376 A JP 1565376A JP S5299079 A JPS5299079 A JP S5299079A
Authority
JP
Japan
Prior art keywords
production
field effect
effect transistor
type field
vertical type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1565376A
Other languages
Japanese (ja)
Inventor
Goro Mitarai
Hiroshi Saikai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1565376A priority Critical patent/JPS5299079A/en
Publication of JPS5299079A publication Critical patent/JPS5299079A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: Accurate forming of gate regions with good controllability is made possible by shortening the diffusion time for gate lead-out diffused layers.
COPYRIGHT: (C)1977,JPO&Japio
JP1565376A 1976-02-16 1976-02-16 Production of vertical type field effect transistor Pending JPS5299079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565376A JPS5299079A (en) 1976-02-16 1976-02-16 Production of vertical type field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565376A JPS5299079A (en) 1976-02-16 1976-02-16 Production of vertical type field effect transistor

Publications (1)

Publication Number Publication Date
JPS5299079A true JPS5299079A (en) 1977-08-19

Family

ID=11894667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565376A Pending JPS5299079A (en) 1976-02-16 1976-02-16 Production of vertical type field effect transistor

Country Status (1)

Country Link
JP (1) JPS5299079A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123781A (en) * 1973-03-31 1974-11-27
JPS5086988A (en) * 1973-11-30 1975-07-12
JPS50149286A (en) * 1974-05-20 1975-11-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123781A (en) * 1973-03-31 1974-11-27
JPS5086988A (en) * 1973-11-30 1975-07-12
JPS50149286A (en) * 1974-05-20 1975-11-29

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