JPS5295167A - Wafer dryer - Google Patents

Wafer dryer

Info

Publication number
JPS5295167A
JPS5295167A JP1145876A JP1145876A JPS5295167A JP S5295167 A JPS5295167 A JP S5295167A JP 1145876 A JP1145876 A JP 1145876A JP 1145876 A JP1145876 A JP 1145876A JP S5295167 A JPS5295167 A JP S5295167A
Authority
JP
Japan
Prior art keywords
fences
wafer dryer
wafer
adherence
adjoining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1145876A
Other languages
Japanese (ja)
Inventor
Shogo Kiyota
Tetsuya Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1145876A priority Critical patent/JPS5295167A/en
Publication of JPS5295167A publication Critical patent/JPS5295167A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To prevent negative pressure and re-adherence of mist onto wafer by providing separation boards between adjoining fences among multi-stage fences which rotates in high speed around a gas nozzle.
COPYRIGHT: (C)1977,JPO&Japio
JP1145876A 1976-02-06 1976-02-06 Wafer dryer Pending JPS5295167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1145876A JPS5295167A (en) 1976-02-06 1976-02-06 Wafer dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145876A JPS5295167A (en) 1976-02-06 1976-02-06 Wafer dryer

Publications (1)

Publication Number Publication Date
JPS5295167A true JPS5295167A (en) 1977-08-10

Family

ID=11778642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1145876A Pending JPS5295167A (en) 1976-02-06 1976-02-06 Wafer dryer

Country Status (1)

Country Link
JP (1) JPS5295167A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984004583A1 (en) * 1980-04-23 1984-11-22 Seiichiro Aigoo Dryer
JPS6090833U (en) * 1983-11-25 1985-06-21 黒谷　巌 Semiconductor material draining and drying equipment
JPS62166524A (en) * 1986-01-20 1987-07-23 Mitsubishi Electric Corp Centrifugal dehydrator
JPS63178321U (en) * 1987-05-11 1988-11-18

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984004583A1 (en) * 1980-04-23 1984-11-22 Seiichiro Aigoo Dryer
JPS6090833U (en) * 1983-11-25 1985-06-21 黒谷　巌 Semiconductor material draining and drying equipment
JPH0514508Y2 (en) * 1983-11-25 1993-04-19
JPS62166524A (en) * 1986-01-20 1987-07-23 Mitsubishi Electric Corp Centrifugal dehydrator
JPS63178321U (en) * 1987-05-11 1988-11-18

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