JPS5289072A - Method of spin coating - Google Patents
Method of spin coatingInfo
- Publication number
- JPS5289072A JPS5289072A JP458776A JP458776A JPS5289072A JP S5289072 A JPS5289072 A JP S5289072A JP 458776 A JP458776 A JP 458776A JP 458776 A JP458776 A JP 458776A JP S5289072 A JPS5289072 A JP S5289072A
- Authority
- JP
- Japan
- Prior art keywords
- spin coating
- spin
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP458776A JPS5289072A (en) | 1976-01-20 | 1976-01-20 | Method of spin coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP458776A JPS5289072A (en) | 1976-01-20 | 1976-01-20 | Method of spin coating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5289072A true JPS5289072A (en) | 1977-07-26 |
Family
ID=11588158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP458776A Pending JPS5289072A (en) | 1976-01-20 | 1976-01-20 | Method of spin coating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5289072A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189235U (en) * | 1983-05-31 | 1984-12-15 | 日本電気ホームエレクトロニクス株式会社 | Coating equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5211868A (en) * | 1975-07-18 | 1977-01-29 | Fujitsu Ltd | Photoresist coating method |
-
1976
- 1976-01-20 JP JP458776A patent/JPS5289072A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5211868A (en) * | 1975-07-18 | 1977-01-29 | Fujitsu Ltd | Photoresist coating method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189235U (en) * | 1983-05-31 | 1984-12-15 | 日本電気ホームエレクトロニクス株式会社 | Coating equipment |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52115214A (en) | Coating method | |
JPS5251436A (en) | Method of coating through electrodeposition | |
JPS5313673A (en) | Method of dyeing | |
JPS52129769A (en) | Coating method | |
JPS536314A (en) | Method of forming vapourrplated coating on glass | |
JPS5298753A (en) | Method of coaguration coating | |
JPS51138762A (en) | Coating method | |
JPS52148282A (en) | Method of dyeing | |
JPS52128477A (en) | Method of dyeing sheettlike structure | |
JPS5289072A (en) | Method of spin coating | |
JPS52132018A (en) | Method of coating with paint | |
GB1543080A (en) | Method of coating objects | |
JPS524573A (en) | Method of coating | |
JPS52136890A (en) | Capsule coating method | |
JPS5317425A (en) | Method of coating pencil | |
JPS52120522A (en) | Method of coating refractory structure | |
JPS52121933A (en) | Method of embanking | |
JPS5335049A (en) | Method of producing coating thread | |
JPS52120269A (en) | Method of forming | |
JPS5376923A (en) | Method of coating sanddmold | |
JPS5345360A (en) | Coating method | |
JPS52151863A (en) | Method of coating integrated circuit | |
JPS52108937A (en) | Method of polybrominating bissphenoxyalkane | |
JPS5377090A (en) | Method of etherizing | |
JPS5361124A (en) | Method of improving waterrproof |