JPS5289072A - Method of spin coating - Google Patents

Method of spin coating

Info

Publication number
JPS5289072A
JPS5289072A JP458776A JP458776A JPS5289072A JP S5289072 A JPS5289072 A JP S5289072A JP 458776 A JP458776 A JP 458776A JP 458776 A JP458776 A JP 458776A JP S5289072 A JPS5289072 A JP S5289072A
Authority
JP
Japan
Prior art keywords
spin coating
spin
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP458776A
Other languages
Japanese (ja)
Inventor
Shiyouzou Ogawa
Yoshihiro Nakajiyou
Fumiko Sawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP458776A priority Critical patent/JPS5289072A/en
Publication of JPS5289072A publication Critical patent/JPS5289072A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP458776A 1976-01-20 1976-01-20 Method of spin coating Pending JPS5289072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP458776A JPS5289072A (en) 1976-01-20 1976-01-20 Method of spin coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP458776A JPS5289072A (en) 1976-01-20 1976-01-20 Method of spin coating

Publications (1)

Publication Number Publication Date
JPS5289072A true JPS5289072A (en) 1977-07-26

Family

ID=11588158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP458776A Pending JPS5289072A (en) 1976-01-20 1976-01-20 Method of spin coating

Country Status (1)

Country Link
JP (1) JPS5289072A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59189235U (en) * 1983-05-31 1984-12-15 日本電気ホームエレクトロニクス株式会社 Coating equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211868A (en) * 1975-07-18 1977-01-29 Fujitsu Ltd Photoresist coating method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211868A (en) * 1975-07-18 1977-01-29 Fujitsu Ltd Photoresist coating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59189235U (en) * 1983-05-31 1984-12-15 日本電気ホームエレクトロニクス株式会社 Coating equipment

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