JPS5283250A - Position detector - Google Patents

Position detector

Info

Publication number
JPS5283250A
JPS5283250A JP15812075A JP15812075A JPS5283250A JP S5283250 A JPS5283250 A JP S5283250A JP 15812075 A JP15812075 A JP 15812075A JP 15812075 A JP15812075 A JP 15812075A JP S5283250 A JPS5283250 A JP S5283250A
Authority
JP
Japan
Prior art keywords
position detector
error
detecting coil
detecting
fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15812075A
Other languages
Japanese (ja)
Inventor
Taketoshi Araya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15812075A priority Critical patent/JPS5283250A/en
Publication of JPS5283250A publication Critical patent/JPS5283250A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: To reduce an error due to the planes's fluctuation of a detecting means, an error caused by the surface roughness and the influence of a pitch error by averaging action by alternately arranging the detection lines of a 0°-detecting coil and those of a 90° detecting coil.
COPYRIGHT: (C)1977,JPO&Japio
JP15812075A 1975-12-30 1975-12-30 Position detector Pending JPS5283250A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15812075A JPS5283250A (en) 1975-12-30 1975-12-30 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15812075A JPS5283250A (en) 1975-12-30 1975-12-30 Position detector

Publications (1)

Publication Number Publication Date
JPS5283250A true JPS5283250A (en) 1977-07-12

Family

ID=15664726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15812075A Pending JPS5283250A (en) 1975-12-30 1975-12-30 Position detector

Country Status (1)

Country Link
JP (1) JPS5283250A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513882A (en) * 1978-07-17 1980-01-31 Samutaku Kk Detector for rotation position
JP2015042095A (en) * 2013-08-23 2015-03-02 シンフォニアテクノロジー株式会社 Plane position detection device, and planar motor and planar stage device including the same
JP2019506613A (en) * 2016-02-24 2019-03-07 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ Rotation angle sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513882A (en) * 1978-07-17 1980-01-31 Samutaku Kk Detector for rotation position
JP2015042095A (en) * 2013-08-23 2015-03-02 シンフォニアテクノロジー株式会社 Plane position detection device, and planar motor and planar stage device including the same
JP2019506613A (en) * 2016-02-24 2019-03-07 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ Rotation angle sensor

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