JPS5277589A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5277589A
JPS5277589A JP15331375A JP15331375A JPS5277589A JP S5277589 A JPS5277589 A JP S5277589A JP 15331375 A JP15331375 A JP 15331375A JP 15331375 A JP15331375 A JP 15331375A JP S5277589 A JPS5277589 A JP S5277589A
Authority
JP
Japan
Prior art keywords
semiconductor device
sio
layers
film
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15331375A
Other languages
Japanese (ja)
Inventor
Hisao Katsuto
Takaaki Hagiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15331375A priority Critical patent/JPS5277589A/en
Publication of JPS5277589A publication Critical patent/JPS5277589A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To make contact pattern smaller by making through-hole in three layers of SiO2 film on material of ground electrode, one of Si, Si3N4, Al2O3 and P added SiO2.
COPYRIGHT: (C)1977,JPO&Japio
JP15331375A 1975-12-24 1975-12-24 Semiconductor device Pending JPS5277589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15331375A JPS5277589A (en) 1975-12-24 1975-12-24 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15331375A JPS5277589A (en) 1975-12-24 1975-12-24 Semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP11408885A Division JPS6116551A (en) 1985-05-29 1985-05-29 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5277589A true JPS5277589A (en) 1977-06-30

Family

ID=15559749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15331375A Pending JPS5277589A (en) 1975-12-24 1975-12-24 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5277589A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163845A (en) * 1979-06-08 1980-12-20 Mitsubishi Electric Corp Manufacturing method for semiconductor device
JPS57173944A (en) * 1981-04-20 1982-10-26 Toshiba Corp Manufacture of semiconductor device
JPS58176963A (en) * 1982-04-09 1983-10-17 Nec Corp Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163845A (en) * 1979-06-08 1980-12-20 Mitsubishi Electric Corp Manufacturing method for semiconductor device
JPS57173944A (en) * 1981-04-20 1982-10-26 Toshiba Corp Manufacture of semiconductor device
JPS58176963A (en) * 1982-04-09 1983-10-17 Nec Corp Semiconductor device

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