JPS5277589A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5277589A JPS5277589A JP15331375A JP15331375A JPS5277589A JP S5277589 A JPS5277589 A JP S5277589A JP 15331375 A JP15331375 A JP 15331375A JP 15331375 A JP15331375 A JP 15331375A JP S5277589 A JPS5277589 A JP S5277589A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- sio
- layers
- film
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To make contact pattern smaller by making through-hole in three layers of SiO2 film on material of ground electrode, one of Si, Si3N4, Al2O3 and P added SiO2.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15331375A JPS5277589A (en) | 1975-12-24 | 1975-12-24 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15331375A JPS5277589A (en) | 1975-12-24 | 1975-12-24 | Semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11408885A Division JPS6116551A (en) | 1985-05-29 | 1985-05-29 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5277589A true JPS5277589A (en) | 1977-06-30 |
Family
ID=15559749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15331375A Pending JPS5277589A (en) | 1975-12-24 | 1975-12-24 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5277589A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55163845A (en) * | 1979-06-08 | 1980-12-20 | Mitsubishi Electric Corp | Manufacturing method for semiconductor device |
JPS57173944A (en) * | 1981-04-20 | 1982-10-26 | Toshiba Corp | Manufacture of semiconductor device |
JPS58176963A (en) * | 1982-04-09 | 1983-10-17 | Nec Corp | Semiconductor device |
-
1975
- 1975-12-24 JP JP15331375A patent/JPS5277589A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55163845A (en) * | 1979-06-08 | 1980-12-20 | Mitsubishi Electric Corp | Manufacturing method for semiconductor device |
JPS57173944A (en) * | 1981-04-20 | 1982-10-26 | Toshiba Corp | Manufacture of semiconductor device |
JPS58176963A (en) * | 1982-04-09 | 1983-10-17 | Nec Corp | Semiconductor device |
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