JPS5275668A - Ionic plating with three electrodes - Google Patents

Ionic plating with three electrodes

Info

Publication number
JPS5275668A
JPS5275668A JP15239475A JP15239475A JPS5275668A JP S5275668 A JPS5275668 A JP S5275668A JP 15239475 A JP15239475 A JP 15239475A JP 15239475 A JP15239475 A JP 15239475A JP S5275668 A JPS5275668 A JP S5275668A
Authority
JP
Japan
Prior art keywords
electrodes
ionic plating
evaporation source
plating
ionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15239475A
Other languages
Japanese (ja)
Other versions
JPS5419232B2 (en
Inventor
Suketsugu Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15239475A priority Critical patent/JPS5275668A/en
Publication of JPS5275668A publication Critical patent/JPS5275668A/en
Publication of JPS5419232B2 publication Critical patent/JPS5419232B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To ionize efficiently without setting a hot filament by applying a positive voltage across a grounded evaporation source and a third electrode arranged in the back of or near the material to be palted in order to heat the evaporation source and to emit thermions.
JP15239475A 1975-12-19 1975-12-19 Ionic plating with three electrodes Granted JPS5275668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15239475A JPS5275668A (en) 1975-12-19 1975-12-19 Ionic plating with three electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15239475A JPS5275668A (en) 1975-12-19 1975-12-19 Ionic plating with three electrodes

Publications (2)

Publication Number Publication Date
JPS5275668A true JPS5275668A (en) 1977-06-24
JPS5419232B2 JPS5419232B2 (en) 1979-07-13

Family

ID=15539547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15239475A Granted JPS5275668A (en) 1975-12-19 1975-12-19 Ionic plating with three electrodes

Country Status (1)

Country Link
JP (1) JPS5275668A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459450A (en) * 1977-10-17 1979-05-14 Toray Industries Needle for processing fiber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459450A (en) * 1977-10-17 1979-05-14 Toray Industries Needle for processing fiber
JPS6117518B2 (en) * 1977-10-17 1986-05-08 Toray Industries

Also Published As

Publication number Publication date
JPS5419232B2 (en) 1979-07-13

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