JPS5275668A - Ionic plating with three electrodes - Google Patents
Ionic plating with three electrodesInfo
- Publication number
- JPS5275668A JPS5275668A JP15239475A JP15239475A JPS5275668A JP S5275668 A JPS5275668 A JP S5275668A JP 15239475 A JP15239475 A JP 15239475A JP 15239475 A JP15239475 A JP 15239475A JP S5275668 A JPS5275668 A JP S5275668A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- ionic plating
- evaporation source
- plating
- ionic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To ionize efficiently without setting a hot filament by applying a positive voltage across a grounded evaporation source and a third electrode arranged in the back of or near the material to be palted in order to heat the evaporation source and to emit thermions.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15239475A JPS5275668A (en) | 1975-12-19 | 1975-12-19 | Ionic plating with three electrodes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15239475A JPS5275668A (en) | 1975-12-19 | 1975-12-19 | Ionic plating with three electrodes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275668A true JPS5275668A (en) | 1977-06-24 |
JPS5419232B2 JPS5419232B2 (en) | 1979-07-13 |
Family
ID=15539547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15239475A Granted JPS5275668A (en) | 1975-12-19 | 1975-12-19 | Ionic plating with three electrodes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275668A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459450A (en) * | 1977-10-17 | 1979-05-14 | Toray Industries | Needle for processing fiber |
-
1975
- 1975-12-19 JP JP15239475A patent/JPS5275668A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459450A (en) * | 1977-10-17 | 1979-05-14 | Toray Industries | Needle for processing fiber |
JPS6117518B2 (en) * | 1977-10-17 | 1986-05-08 | Toray Industries |
Also Published As
Publication number | Publication date |
---|---|
JPS5419232B2 (en) | 1979-07-13 |
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