JPS526589A - Monochrometor - Google Patents

Monochrometor

Info

Publication number
JPS526589A
JPS526589A JP8186175A JP8186175A JPS526589A JP S526589 A JPS526589 A JP S526589A JP 8186175 A JP8186175 A JP 8186175A JP 8186175 A JP8186175 A JP 8186175A JP S526589 A JPS526589 A JP S526589A
Authority
JP
Japan
Prior art keywords
magnets
monochrometor
electron
pesmanent
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8186175A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8186175A priority Critical patent/JPS526589A/en
Publication of JPS526589A publication Critical patent/JPS526589A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain an electron in which the electron beam energies are uniform by generating focusing fields with pesmanent magnets and by forming the permenent magnets and speed reducer into a unit.
JP8186175A 1975-07-04 1975-07-04 Monochrometor Pending JPS526589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8186175A JPS526589A (en) 1975-07-04 1975-07-04 Monochrometor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8186175A JPS526589A (en) 1975-07-04 1975-07-04 Monochrometor

Publications (1)

Publication Number Publication Date
JPS526589A true JPS526589A (en) 1977-01-19

Family

ID=13758255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8186175A Pending JPS526589A (en) 1975-07-04 1975-07-04 Monochrometor

Country Status (1)

Country Link
JP (1) JPS526589A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648117U (en) * 1979-09-20 1981-04-28
JPS5665514A (en) * 1979-11-01 1981-06-03 Marantz Japan Inc Control circuit of voltage feedback type
JPS56114107U (en) * 1980-01-31 1981-09-02
JPS58222606A (en) * 1982-06-21 1983-12-24 Nec Corp Electronic circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648117U (en) * 1979-09-20 1981-04-28
JPS5665514A (en) * 1979-11-01 1981-06-03 Marantz Japan Inc Control circuit of voltage feedback type
JPS56114107U (en) * 1980-01-31 1981-09-02
JPS58222606A (en) * 1982-06-21 1983-12-24 Nec Corp Electronic circuit

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