JPS5263691A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS5263691A JPS5263691A JP50139894A JP13989475A JPS5263691A JP S5263691 A JPS5263691 A JP S5263691A JP 50139894 A JP50139894 A JP 50139894A JP 13989475 A JP13989475 A JP 13989475A JP S5263691 A JPS5263691 A JP S5263691A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- increase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
PURPOSE: To increase the current amplification factor of the upon transistor of an I2L element by making the depth of the buried layer of the I2L element shallower than the buried layer of the bipolar transistor to form by separate ion implantation method in order to increase the electron injection efficiency from emitter.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50139894A JPS5263691A (en) | 1975-11-20 | 1975-11-20 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50139894A JPS5263691A (en) | 1975-11-20 | 1975-11-20 | Production of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5263691A true JPS5263691A (en) | 1977-05-26 |
Family
ID=15256076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50139894A Pending JPS5263691A (en) | 1975-11-20 | 1975-11-20 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5263691A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533781A (en) * | 1976-06-30 | 1978-01-13 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
-
1975
- 1975-11-20 JP JP50139894A patent/JPS5263691A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533781A (en) * | 1976-06-30 | 1978-01-13 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
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