JPS5260568A - Production of schottky diode - Google Patents

Production of schottky diode

Info

Publication number
JPS5260568A
JPS5260568A JP13618375A JP13618375A JPS5260568A JP S5260568 A JPS5260568 A JP S5260568A JP 13618375 A JP13618375 A JP 13618375A JP 13618375 A JP13618375 A JP 13618375A JP S5260568 A JPS5260568 A JP S5260568A
Authority
JP
Japan
Prior art keywords
schottky diode
production
palnar
sputter
produce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13618375A
Other languages
Japanese (ja)
Inventor
Haruo Yamagishi
Hideaki Izumi
Hisao Kamo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13618375A priority Critical patent/JPS5260568A/en
Publication of JPS5260568A publication Critical patent/JPS5260568A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To produce a good palnar GaAs Schottky diode by using sputter.
COPYRIGHT: (C)1977,JPO&Japio
JP13618375A 1975-11-14 1975-11-14 Production of schottky diode Pending JPS5260568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13618375A JPS5260568A (en) 1975-11-14 1975-11-14 Production of schottky diode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13618375A JPS5260568A (en) 1975-11-14 1975-11-14 Production of schottky diode

Publications (1)

Publication Number Publication Date
JPS5260568A true JPS5260568A (en) 1977-05-19

Family

ID=15169274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13618375A Pending JPS5260568A (en) 1975-11-14 1975-11-14 Production of schottky diode

Country Status (1)

Country Link
JP (1) JPS5260568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951121A (en) * 1984-11-14 1990-08-21 Kabushiki Kaisha Toshiba Semiconductor device with a 3-ply gate electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951121A (en) * 1984-11-14 1990-08-21 Kabushiki Kaisha Toshiba Semiconductor device with a 3-ply gate electrode

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