JPS5260058A - Astigmatism correction system of electronic microscope objective lens - Google Patents

Astigmatism correction system of electronic microscope objective lens

Info

Publication number
JPS5260058A
JPS5260058A JP13600475A JP13600475A JPS5260058A JP S5260058 A JPS5260058 A JP S5260058A JP 13600475 A JP13600475 A JP 13600475A JP 13600475 A JP13600475 A JP 13600475A JP S5260058 A JPS5260058 A JP S5260058A
Authority
JP
Japan
Prior art keywords
objective lens
correction system
microscope objective
electronic microscope
astigmatism correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13600475A
Other languages
Japanese (ja)
Other versions
JPS589545B2 (en
Inventor
Hisao Watanabe
Terukazu Eto
Takashi Yanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP13600475A priority Critical patent/JPS589545B2/en
Publication of JPS5260058A publication Critical patent/JPS5260058A/en
Publication of JPS589545B2 publication Critical patent/JPS589545B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: The variation of focus current value of objective lens is detected according to variation of sample position in order to adjust the supply current or voltage to correction unit. As a result, the astigmatism is effectively corrected for the objective lens.
COPYRIGHT: (C)1977,JPO&Japio
JP13600475A 1975-11-12 1975-11-12 How to get the most out of your day Expired JPS589545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13600475A JPS589545B2 (en) 1975-11-12 1975-11-12 How to get the most out of your day

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13600475A JPS589545B2 (en) 1975-11-12 1975-11-12 How to get the most out of your day

Publications (2)

Publication Number Publication Date
JPS5260058A true JPS5260058A (en) 1977-05-18
JPS589545B2 JPS589545B2 (en) 1983-02-21

Family

ID=15164930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13600475A Expired JPS589545B2 (en) 1975-11-12 1975-11-12 How to get the most out of your day

Country Status (1)

Country Link
JP (1) JPS589545B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957592A (en) * 1996-12-20 1999-09-28 Shiman., Inc. Expandable bearing retainer
JP2009054575A (en) * 2007-07-31 2009-03-12 Hitachi High-Technologies Corp Scanning electron microscope alignment method and scanning electron microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60159254U (en) * 1984-03-30 1985-10-23 アイシン精機株式会社 V-belt for continuously variable transmission

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957592A (en) * 1996-12-20 1999-09-28 Shiman., Inc. Expandable bearing retainer
JP2009054575A (en) * 2007-07-31 2009-03-12 Hitachi High-Technologies Corp Scanning electron microscope alignment method and scanning electron microscope

Also Published As

Publication number Publication date
JPS589545B2 (en) 1983-02-21

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