JPS5260058A - Astigmatism correction system of electronic microscope objective lens - Google Patents
Astigmatism correction system of electronic microscope objective lensInfo
- Publication number
- JPS5260058A JPS5260058A JP13600475A JP13600475A JPS5260058A JP S5260058 A JPS5260058 A JP S5260058A JP 13600475 A JP13600475 A JP 13600475A JP 13600475 A JP13600475 A JP 13600475A JP S5260058 A JPS5260058 A JP S5260058A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- correction system
- microscope objective
- electronic microscope
- astigmatism correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: The variation of focus current value of objective lens is detected according to variation of sample position in order to adjust the supply current or voltage to correction unit. As a result, the astigmatism is effectively corrected for the objective lens.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13600475A JPS589545B2 (en) | 1975-11-12 | 1975-11-12 | How to get the most out of your day |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13600475A JPS589545B2 (en) | 1975-11-12 | 1975-11-12 | How to get the most out of your day |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5260058A true JPS5260058A (en) | 1977-05-18 |
JPS589545B2 JPS589545B2 (en) | 1983-02-21 |
Family
ID=15164930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13600475A Expired JPS589545B2 (en) | 1975-11-12 | 1975-11-12 | How to get the most out of your day |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS589545B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5957592A (en) * | 1996-12-20 | 1999-09-28 | Shiman., Inc. | Expandable bearing retainer |
JP2009054575A (en) * | 2007-07-31 | 2009-03-12 | Hitachi High-Technologies Corp | Scanning electron microscope alignment method and scanning electron microscope |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60159254U (en) * | 1984-03-30 | 1985-10-23 | アイシン精機株式会社 | V-belt for continuously variable transmission |
-
1975
- 1975-11-12 JP JP13600475A patent/JPS589545B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5957592A (en) * | 1996-12-20 | 1999-09-28 | Shiman., Inc. | Expandable bearing retainer |
JP2009054575A (en) * | 2007-07-31 | 2009-03-12 | Hitachi High-Technologies Corp | Scanning electron microscope alignment method and scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS589545B2 (en) | 1983-02-21 |
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