JPS5239069U - - Google Patents
Info
- Publication number
- JPS5239069U JPS5239069U JP12516175U JP12516175U JPS5239069U JP S5239069 U JPS5239069 U JP S5239069U JP 12516175 U JP12516175 U JP 12516175U JP 12516175 U JP12516175 U JP 12516175U JP S5239069 U JPS5239069 U JP S5239069U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975125161U JPS574379Y2 (ja) | 1975-09-11 | 1975-09-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975125161U JPS574379Y2 (ja) | 1975-09-11 | 1975-09-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5239069U true JPS5239069U (ja) | 1977-03-19 |
JPS574379Y2 JPS574379Y2 (ja) | 1982-01-27 |
Family
ID=28605652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1975125161U Expired JPS574379Y2 (ja) | 1975-09-11 | 1975-09-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS574379Y2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0290620B1 (en) * | 1986-11-28 | 1994-10-12 | Nippon Telegraph And Telephone Corporation | Apparatus for observation using charged particle beams and method of surface observation using charged particle beams |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984359A (ja) * | 1972-12-18 | 1974-08-13 |
-
1975
- 1975-09-11 JP JP1975125161U patent/JPS574379Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984359A (ja) * | 1972-12-18 | 1974-08-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS574379Y2 (ja) | 1982-01-27 |