JPS5231651A - Scan-type electron microscope - Google Patents
Scan-type electron microscopeInfo
- Publication number
- JPS5231651A JPS5231651A JP10774175A JP10774175A JPS5231651A JP S5231651 A JPS5231651 A JP S5231651A JP 10774175 A JP10774175 A JP 10774175A JP 10774175 A JP10774175 A JP 10774175A JP S5231651 A JPS5231651 A JP S5231651A
- Authority
- JP
- Japan
- Prior art keywords
- scan
- electron microscope
- type electron
- thermion
- monocrystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To facilitate smaller beam diameter, higher light intensity and resolution by using lanthanum boride monocrystal having top end radius of 5μm on less for thermion radiation cathode of scan-type electron microscope.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774175A JPS5231651A (en) | 1975-09-04 | 1975-09-04 | Scan-type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774175A JPS5231651A (en) | 1975-09-04 | 1975-09-04 | Scan-type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5231651A true JPS5231651A (en) | 1977-03-10 |
Family
ID=14466768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10774175A Pending JPS5231651A (en) | 1975-09-04 | 1975-09-04 | Scan-type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5231651A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5451474A (en) * | 1977-09-30 | 1979-04-23 | Denki Kagaku Kogyo Kk | Monocrystal thermionic emission cathode material |
JPS5451473A (en) * | 1977-09-30 | 1979-04-23 | Denki Kagaku Kogyo Kk | Thermionic emission cathode |
JPS5796437A (en) * | 1980-12-09 | 1982-06-15 | Denki Kagaku Kogyo Kk | Thermion emission cathode |
JPH03267430A (en) * | 1990-03-16 | 1991-11-28 | Shimizu Corp | Dome and constructing method therefor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3711908A (en) * | 1970-08-27 | 1973-01-23 | Ibm | Method for forming small diameter tips on sintered material cathodes |
US3833494A (en) * | 1972-05-30 | 1974-09-03 | Philips Corp | Method of manufacturing a lanthanum hexaboride-activated cathode for an electric discharge tube |
-
1975
- 1975-09-04 JP JP10774175A patent/JPS5231651A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3711908A (en) * | 1970-08-27 | 1973-01-23 | Ibm | Method for forming small diameter tips on sintered material cathodes |
US3833494A (en) * | 1972-05-30 | 1974-09-03 | Philips Corp | Method of manufacturing a lanthanum hexaboride-activated cathode for an electric discharge tube |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5451474A (en) * | 1977-09-30 | 1979-04-23 | Denki Kagaku Kogyo Kk | Monocrystal thermionic emission cathode material |
JPS5451473A (en) * | 1977-09-30 | 1979-04-23 | Denki Kagaku Kogyo Kk | Thermionic emission cathode |
JPS5812695B2 (en) * | 1977-09-30 | 1983-03-09 | 電気化学工業株式会社 | Manufacturing method of thermionic emission cathode |
JPS615251B2 (en) * | 1977-09-30 | 1986-02-17 | Denki Kagaku Kogyo Kk | |
JPS5796437A (en) * | 1980-12-09 | 1982-06-15 | Denki Kagaku Kogyo Kk | Thermion emission cathode |
JPH0311054B2 (en) * | 1980-12-09 | 1991-02-15 | Denki Kagaku Kogyo Kk | |
JPH03267430A (en) * | 1990-03-16 | 1991-11-28 | Shimizu Corp | Dome and constructing method therefor |
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