JPS5231651A - Scan-type electron microscope - Google Patents

Scan-type electron microscope

Info

Publication number
JPS5231651A
JPS5231651A JP10774175A JP10774175A JPS5231651A JP S5231651 A JPS5231651 A JP S5231651A JP 10774175 A JP10774175 A JP 10774175A JP 10774175 A JP10774175 A JP 10774175A JP S5231651 A JPS5231651 A JP S5231651A
Authority
JP
Japan
Prior art keywords
scan
electron microscope
type electron
thermion
monocrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10774175A
Other languages
Japanese (ja)
Inventor
Nanao Kawai
Takao Tanaka
Hidenori Sakauchi
Ryuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Research in Inorganic Material
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP10774175A priority Critical patent/JPS5231651A/en
Publication of JPS5231651A publication Critical patent/JPS5231651A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To facilitate smaller beam diameter, higher light intensity and resolution by using lanthanum boride monocrystal having top end radius of 5μm on less for thermion radiation cathode of scan-type electron microscope.
COPYRIGHT: (C)1977,JPO&Japio
JP10774175A 1975-09-04 1975-09-04 Scan-type electron microscope Pending JPS5231651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10774175A JPS5231651A (en) 1975-09-04 1975-09-04 Scan-type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10774175A JPS5231651A (en) 1975-09-04 1975-09-04 Scan-type electron microscope

Publications (1)

Publication Number Publication Date
JPS5231651A true JPS5231651A (en) 1977-03-10

Family

ID=14466768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10774175A Pending JPS5231651A (en) 1975-09-04 1975-09-04 Scan-type electron microscope

Country Status (1)

Country Link
JP (1) JPS5231651A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451474A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Monocrystal thermionic emission cathode material
JPS5451473A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Thermionic emission cathode
JPS5796437A (en) * 1980-12-09 1982-06-15 Denki Kagaku Kogyo Kk Thermion emission cathode
JPH03267430A (en) * 1990-03-16 1991-11-28 Shimizu Corp Dome and constructing method therefor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3711908A (en) * 1970-08-27 1973-01-23 Ibm Method for forming small diameter tips on sintered material cathodes
US3833494A (en) * 1972-05-30 1974-09-03 Philips Corp Method of manufacturing a lanthanum hexaboride-activated cathode for an electric discharge tube

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3711908A (en) * 1970-08-27 1973-01-23 Ibm Method for forming small diameter tips on sintered material cathodes
US3833494A (en) * 1972-05-30 1974-09-03 Philips Corp Method of manufacturing a lanthanum hexaboride-activated cathode for an electric discharge tube

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451474A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Monocrystal thermionic emission cathode material
JPS5451473A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Thermionic emission cathode
JPS5812695B2 (en) * 1977-09-30 1983-03-09 電気化学工業株式会社 Manufacturing method of thermionic emission cathode
JPS615251B2 (en) * 1977-09-30 1986-02-17 Denki Kagaku Kogyo Kk
JPS5796437A (en) * 1980-12-09 1982-06-15 Denki Kagaku Kogyo Kk Thermion emission cathode
JPH0311054B2 (en) * 1980-12-09 1991-02-15 Denki Kagaku Kogyo Kk
JPH03267430A (en) * 1990-03-16 1991-11-28 Shimizu Corp Dome and constructing method therefor

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