JPS5222881A - Thin film etching system on semiconductor base plate - Google Patents

Thin film etching system on semiconductor base plate

Info

Publication number
JPS5222881A
JPS5222881A JP9895075A JP9895075A JPS5222881A JP S5222881 A JPS5222881 A JP S5222881A JP 9895075 A JP9895075 A JP 9895075A JP 9895075 A JP9895075 A JP 9895075A JP S5222881 A JPS5222881 A JP S5222881A
Authority
JP
Japan
Prior art keywords
thin film
base plate
semiconductor base
etching system
film etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9895075A
Other languages
Japanese (ja)
Other versions
JPS5823931B2 (en
Inventor
Hisao Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9895075A priority Critical patent/JPS5823931B2/en
Publication of JPS5222881A publication Critical patent/JPS5222881A/en
Publication of JPS5823931B2 publication Critical patent/JPS5823931B2/en
Expired legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: To cleanly and accurately perform selective etching on multi-crystal silicon layer containing oxygen or nitrogen which has superior characters as an surface stabilizer layer or optical coating layer for a semiconductor unit.
COPYRIGHT: (C)1977,JPO&Japio
JP9895075A 1975-08-14 1975-08-14 How to use a hand hacking tool Expired JPS5823931B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9895075A JPS5823931B2 (en) 1975-08-14 1975-08-14 How to use a hand hacking tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9895075A JPS5823931B2 (en) 1975-08-14 1975-08-14 How to use a hand hacking tool

Publications (2)

Publication Number Publication Date
JPS5222881A true JPS5222881A (en) 1977-02-21
JPS5823931B2 JPS5823931B2 (en) 1983-05-18

Family

ID=14233367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9895075A Expired JPS5823931B2 (en) 1975-08-14 1975-08-14 How to use a hand hacking tool

Country Status (1)

Country Link
JP (1) JPS5823931B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594697U (en) * 1978-12-22 1980-07-01
US5281544A (en) * 1990-07-23 1994-01-25 Seiko Epson Corporation Method of manufacturing planar type polar transistors and combination bipolar/MIS type transistors
US5404043A (en) * 1990-07-23 1995-04-04 Seiko Epson Corporation Semiconductor devices of the planar type bipolar transistors and combination bipolar/MIS type transistors
US5560857A (en) * 1993-10-19 1996-10-01 Nippon Steel Corporation Solution for cleaning silicon semiconductors and silicon oxides

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61176340U (en) * 1985-04-20 1986-11-04
JPS6221245U (en) * 1985-07-20 1987-02-07
JPH0323935Y2 (en) * 1986-03-31 1991-05-24

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594697U (en) * 1978-12-22 1980-07-01
JPS5919711Y2 (en) * 1978-12-22 1984-06-07 川崎製鉄株式会社 Furnace wall cooling device
US5281544A (en) * 1990-07-23 1994-01-25 Seiko Epson Corporation Method of manufacturing planar type polar transistors and combination bipolar/MIS type transistors
US5404043A (en) * 1990-07-23 1995-04-04 Seiko Epson Corporation Semiconductor devices of the planar type bipolar transistors and combination bipolar/MIS type transistors
US5560857A (en) * 1993-10-19 1996-10-01 Nippon Steel Corporation Solution for cleaning silicon semiconductors and silicon oxides

Also Published As

Publication number Publication date
JPS5823931B2 (en) 1983-05-18

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