JPS522273A - Method of treating semiconductor substrate - Google Patents
Method of treating semiconductor substrateInfo
- Publication number
- JPS522273A JPS522273A JP7684575A JP7684575A JPS522273A JP S522273 A JPS522273 A JP S522273A JP 7684575 A JP7684575 A JP 7684575A JP 7684575 A JP7684575 A JP 7684575A JP S522273 A JPS522273 A JP S522273A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- treating semiconductor
- treating
- beforehand
- effecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form a uniform porous layer by effecting beforehand an activation treatment on the surfaces to be treated of semiconductor substrates.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7684575A JPS522273A (en) | 1975-06-24 | 1975-06-24 | Method of treating semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7684575A JPS522273A (en) | 1975-06-24 | 1975-06-24 | Method of treating semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS522273A true JPS522273A (en) | 1977-01-08 |
Family
ID=13616986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7684575A Pending JPS522273A (en) | 1975-06-24 | 1975-06-24 | Method of treating semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS522273A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518047B1 (en) * | 1975-11-10 | 1980-05-16 |
-
1975
- 1975-06-24 JP JP7684575A patent/JPS522273A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518047B1 (en) * | 1975-11-10 | 1980-05-16 |
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