JPS5218599A - Power source device for charged beam system - Google Patents
Power source device for charged beam systemInfo
- Publication number
- JPS5218599A JPS5218599A JP50093949A JP9394975A JPS5218599A JP S5218599 A JPS5218599 A JP S5218599A JP 50093949 A JP50093949 A JP 50093949A JP 9394975 A JP9394975 A JP 9394975A JP S5218599 A JPS5218599 A JP S5218599A
- Authority
- JP
- Japan
- Prior art keywords
- power source
- source device
- beam system
- charged beam
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002411 adverse Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
Landscapes
- Particle Accelerators (AREA)
- Discharge Heating (AREA)
- Electron Sources, Ion Sources (AREA)
- Control Of Voltage And Current In General (AREA)
Abstract
PURPOSE: A power source device which can minimize damage and other adverse effect caused by discharge in charged beam system.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50093949A JPS5218599A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50093949A JPS5218599A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5218599A true JPS5218599A (en) | 1977-02-12 |
JPS6228560B2 JPS6228560B2 (en) | 1987-06-20 |
Family
ID=14096676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50093949A Granted JPS5218599A (en) | 1975-08-01 | 1975-08-01 | Power source device for charged beam system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5218599A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55145170A (en) * | 1979-04-28 | 1980-11-12 | Tokuda Seisakusho Ltd | Arc-breaking method of direct current electric discharge unit and its circuit |
JPS5680552A (en) * | 1979-11-26 | 1981-07-01 | Keikan Kin | Automatic stepless speed change device |
US5552590A (en) * | 1992-09-08 | 1996-09-03 | Nippondenso Co., Ltd. | Optical information reading apparatus having means for judging laser deterioration |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63212581A (en) * | 1987-12-04 | 1988-09-05 | Canon Inc | Ink ribbon cassette and recorder mounted said cassette |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827278A (en) * | 1971-08-18 | 1973-04-10 |
-
1975
- 1975-08-01 JP JP50093949A patent/JPS5218599A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827278A (en) * | 1971-08-18 | 1973-04-10 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55145170A (en) * | 1979-04-28 | 1980-11-12 | Tokuda Seisakusho Ltd | Arc-breaking method of direct current electric discharge unit and its circuit |
JPS5680552A (en) * | 1979-11-26 | 1981-07-01 | Keikan Kin | Automatic stepless speed change device |
US5552590A (en) * | 1992-09-08 | 1996-09-03 | Nippondenso Co., Ltd. | Optical information reading apparatus having means for judging laser deterioration |
Also Published As
Publication number | Publication date |
---|---|
JPS6228560B2 (en) | 1987-06-20 |
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