JPS5218161A - Sample scan type sample image display unit - Google Patents

Sample scan type sample image display unit

Info

Publication number
JPS5218161A
JPS5218161A JP9312675A JP9312675A JPS5218161A JP S5218161 A JPS5218161 A JP S5218161A JP 9312675 A JP9312675 A JP 9312675A JP 9312675 A JP9312675 A JP 9312675A JP S5218161 A JPS5218161 A JP S5218161A
Authority
JP
Japan
Prior art keywords
sample
display unit
image display
scan type
sample image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9312675A
Other languages
Japanese (ja)
Other versions
JPS5811073B2 (en
Inventor
Fumio Mizuno
Hideyuki Kakiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9312675A priority Critical patent/JPS5811073B2/en
Publication of JPS5218161A publication Critical patent/JPS5218161A/en
Publication of JPS5811073B2 publication Critical patent/JPS5811073B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: In order to simply and accurately correct the astigmatism through finding the point where the astigmatism is corrected within the field of vision, by means of synchronously fluctuating the magnitude of the astigmatism correction field being formed from two sets of cylindrical lenses with the scanning into X, Y Axis directions.
COPYRIGHT: (C)1977,JPO&Japio
JP9312675A 1975-08-01 1975-08-01 Sample scanning type sample image display device using particle beam Expired JPS5811073B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9312675A JPS5811073B2 (en) 1975-08-01 1975-08-01 Sample scanning type sample image display device using particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9312675A JPS5811073B2 (en) 1975-08-01 1975-08-01 Sample scanning type sample image display device using particle beam

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57127721A Division JPS5840758A (en) 1982-07-23 1982-07-23 Astigmatism correction in sample-scanning-type sample- image displayer by means of particle rays

Publications (2)

Publication Number Publication Date
JPS5218161A true JPS5218161A (en) 1977-02-10
JPS5811073B2 JPS5811073B2 (en) 1983-03-01

Family

ID=14073816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9312675A Expired JPS5811073B2 (en) 1975-08-01 1975-08-01 Sample scanning type sample image display device using particle beam

Country Status (1)

Country Link
JP (1) JPS5811073B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556784A (en) * 1979-03-28 1980-01-18 Jeol Ltd Method and device for astrigmatism correction in scanning electron microscope
JPS574533A (en) * 1980-06-12 1982-01-11 Nichidenshi Tekunikusu:Kk Detecting method of astigmatism
JPS6134840A (en) * 1985-03-11 1986-02-19 Hitachi Ltd Astigmatism correction in sample scanning type sample image display device by particle rays

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556784A (en) * 1979-03-28 1980-01-18 Jeol Ltd Method and device for astrigmatism correction in scanning electron microscope
JPS6151377B2 (en) * 1979-03-28 1986-11-08 Nippon Electron Optics Lab
JPS574533A (en) * 1980-06-12 1982-01-11 Nichidenshi Tekunikusu:Kk Detecting method of astigmatism
JPS6314811B2 (en) * 1980-06-12 1988-04-01 Nichidenshi Technics Kk
JPS6134840A (en) * 1985-03-11 1986-02-19 Hitachi Ltd Astigmatism correction in sample scanning type sample image display device by particle rays

Also Published As

Publication number Publication date
JPS5811073B2 (en) 1983-03-01

Similar Documents

Publication Publication Date Title
JPS5257824A (en) Lens for copying
JPS5237445A (en) Lens system rendering variable characteristics of an image plane
JPS52104097A (en) Field effect liquid crystal display
JPS5218161A (en) Sample scan type sample image display unit
JPS5332753A (en) Microscope objective lens
JPS5430026A (en) Objective lens of high reduced scale
JPS5231661A (en) Color receiving tube
JPS5418759A (en) Optical scanner
JPS5245259A (en) Color picture tube device
JPS52125236A (en) Letter display system in tv scan character display
JPS5237444A (en) Lens for infrared rays
JPS51144654A (en) Microscope image input device
JPS5250620A (en) Image display device
JPS52132884A (en) Apparatus for measuring amount of distortion
JPS51118458A (en) Electrooptic cell
JPS51124370A (en) Focus correction device for scanning type electron microscope
JPS5251862A (en) Scanning micro-probe equipment
JPS5242023A (en) Optical reader with distortion corrcting set
JPS5328330A (en) Cathode ray tube
JPS5282014A (en) Correction unit of deflecting distortion
JPS5294769A (en) Scanning sample image display method and its equipment
JPS5367312A (en) Best focal point detector for television picture image
JPS57104879A (en) Analog watch with mirror
JPS5315737A (en) Magnification ratio display unit for scanning type electronic microscope
JPS5233634A (en) Process for preparation of 4-nitroso-3-methyl or unsubstituted-n-substituted anilines