JPS5218161A - Sample scan type sample image display unit - Google Patents
Sample scan type sample image display unitInfo
- Publication number
- JPS5218161A JPS5218161A JP9312675A JP9312675A JPS5218161A JP S5218161 A JPS5218161 A JP S5218161A JP 9312675 A JP9312675 A JP 9312675A JP 9312675 A JP9312675 A JP 9312675A JP S5218161 A JPS5218161 A JP S5218161A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- display unit
- image display
- scan type
- sample image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: In order to simply and accurately correct the astigmatism through finding the point where the astigmatism is corrected within the field of vision, by means of synchronously fluctuating the magnitude of the astigmatism correction field being formed from two sets of cylindrical lenses with the scanning into X, Y Axis directions.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9312675A JPS5811073B2 (en) | 1975-08-01 | 1975-08-01 | Sample scanning type sample image display device using particle beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9312675A JPS5811073B2 (en) | 1975-08-01 | 1975-08-01 | Sample scanning type sample image display device using particle beam |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57127721A Division JPS5840758A (en) | 1982-07-23 | 1982-07-23 | Astigmatism correction in sample-scanning-type sample- image displayer by means of particle rays |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5218161A true JPS5218161A (en) | 1977-02-10 |
JPS5811073B2 JPS5811073B2 (en) | 1983-03-01 |
Family
ID=14073816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9312675A Expired JPS5811073B2 (en) | 1975-08-01 | 1975-08-01 | Sample scanning type sample image display device using particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5811073B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556784A (en) * | 1979-03-28 | 1980-01-18 | Jeol Ltd | Method and device for astrigmatism correction in scanning electron microscope |
JPS574533A (en) * | 1980-06-12 | 1982-01-11 | Nichidenshi Tekunikusu:Kk | Detecting method of astigmatism |
JPS6134840A (en) * | 1985-03-11 | 1986-02-19 | Hitachi Ltd | Astigmatism correction in sample scanning type sample image display device by particle rays |
-
1975
- 1975-08-01 JP JP9312675A patent/JPS5811073B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556784A (en) * | 1979-03-28 | 1980-01-18 | Jeol Ltd | Method and device for astrigmatism correction in scanning electron microscope |
JPS6151377B2 (en) * | 1979-03-28 | 1986-11-08 | Nippon Electron Optics Lab | |
JPS574533A (en) * | 1980-06-12 | 1982-01-11 | Nichidenshi Tekunikusu:Kk | Detecting method of astigmatism |
JPS6314811B2 (en) * | 1980-06-12 | 1988-04-01 | Nichidenshi Technics Kk | |
JPS6134840A (en) * | 1985-03-11 | 1986-02-19 | Hitachi Ltd | Astigmatism correction in sample scanning type sample image display device by particle rays |
Also Published As
Publication number | Publication date |
---|---|
JPS5811073B2 (en) | 1983-03-01 |
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