JPS52143770A - Mask aligning method - Google Patents
Mask aligning methodInfo
- Publication number
- JPS52143770A JPS52143770A JP6001476A JP6001476A JPS52143770A JP S52143770 A JPS52143770 A JP S52143770A JP 6001476 A JP6001476 A JP 6001476A JP 6001476 A JP6001476 A JP 6001476A JP S52143770 A JPS52143770 A JP S52143770A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- aligning method
- mask aligning
- alignment patterns
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To perform highly accurate mask aligning by coinciding second mask alignment patterns which are rotated at a given angle with respect to the mask alignment patterns on an IC circuit, to said mask alignment patterns on the IC circuit and magnifying the deviation in alignment to make its detection easy.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6001476A JPS52143770A (en) | 1976-05-26 | 1976-05-26 | Mask aligning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6001476A JPS52143770A (en) | 1976-05-26 | 1976-05-26 | Mask aligning method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52143770A true JPS52143770A (en) | 1977-11-30 |
Family
ID=13129778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6001476A Pending JPS52143770A (en) | 1976-05-26 | 1976-05-26 | Mask aligning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52143770A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57169239A (en) * | 1981-04-09 | 1982-10-18 | Nec Corp | Semiconductor device |
JPS57176720A (en) * | 1981-04-22 | 1982-10-30 | Nec Corp | Semiconductor device |
JPS57192028A (en) * | 1981-05-20 | 1982-11-26 | Matsushita Electric Ind Co Ltd | Mask set and positioning method for mask |
-
1976
- 1976-05-26 JP JP6001476A patent/JPS52143770A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57169239A (en) * | 1981-04-09 | 1982-10-18 | Nec Corp | Semiconductor device |
JPS6216535B2 (en) * | 1981-04-09 | 1987-04-13 | Nippon Electric Co | |
JPS57176720A (en) * | 1981-04-22 | 1982-10-30 | Nec Corp | Semiconductor device |
JPS57192028A (en) * | 1981-05-20 | 1982-11-26 | Matsushita Electric Ind Co Ltd | Mask set and positioning method for mask |
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