JPS5214372A - Pinching tool of the semiconducter wafer - Google Patents
Pinching tool of the semiconducter waferInfo
- Publication number
- JPS5214372A JPS5214372A JP9024175A JP9024175A JPS5214372A JP S5214372 A JPS5214372 A JP S5214372A JP 9024175 A JP9024175 A JP 9024175A JP 9024175 A JP9024175 A JP 9024175A JP S5214372 A JPS5214372 A JP S5214372A
- Authority
- JP
- Japan
- Prior art keywords
- pinching tool
- wafer
- semiconducter
- semiconducter wafer
- pinching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surgical Instruments (AREA)
Abstract
PURPOSE: To decrease the surface scratch of wafer and damage by pinching it in periphery with the elastic power of material of holding tool.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9024175A JPS5214372A (en) | 1975-07-25 | 1975-07-25 | Pinching tool of the semiconducter wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9024175A JPS5214372A (en) | 1975-07-25 | 1975-07-25 | Pinching tool of the semiconducter wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5214372A true JPS5214372A (en) | 1977-02-03 |
Family
ID=13992988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9024175A Pending JPS5214372A (en) | 1975-07-25 | 1975-07-25 | Pinching tool of the semiconducter wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5214372A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4717190A (en) * | 1986-10-30 | 1988-01-05 | Witherspoon Linda L | Wafer handling and placement tool |
US5217464A (en) * | 1992-06-01 | 1993-06-08 | Henry H. McDonald | Three bar cross action lens implantation forceps |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4920454B1 (en) * | 1966-03-28 | 1974-05-24 | ||
JPS4921299B1 (en) * | 1970-12-15 | 1974-05-31 |
-
1975
- 1975-07-25 JP JP9024175A patent/JPS5214372A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4920454B1 (en) * | 1966-03-28 | 1974-05-24 | ||
JPS4921299B1 (en) * | 1970-12-15 | 1974-05-31 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4717190A (en) * | 1986-10-30 | 1988-01-05 | Witherspoon Linda L | Wafer handling and placement tool |
US5217464A (en) * | 1992-06-01 | 1993-06-08 | Henry H. McDonald | Three bar cross action lens implantation forceps |
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