JPS5214372A - Pinching tool of the semiconducter wafer - Google Patents

Pinching tool of the semiconducter wafer

Info

Publication number
JPS5214372A
JPS5214372A JP9024175A JP9024175A JPS5214372A JP S5214372 A JPS5214372 A JP S5214372A JP 9024175 A JP9024175 A JP 9024175A JP 9024175 A JP9024175 A JP 9024175A JP S5214372 A JPS5214372 A JP S5214372A
Authority
JP
Japan
Prior art keywords
pinching tool
wafer
semiconducter
semiconducter wafer
pinching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9024175A
Other languages
Japanese (ja)
Inventor
Makoto Haneda
Kyozo Kaise
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9024175A priority Critical patent/JPS5214372A/en
Publication of JPS5214372A publication Critical patent/JPS5214372A/en
Pending legal-status Critical Current

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  • Surgical Instruments (AREA)

Abstract

PURPOSE: To decrease the surface scratch of wafer and damage by pinching it in periphery with the elastic power of material of holding tool.
COPYRIGHT: (C)1977,JPO&Japio
JP9024175A 1975-07-25 1975-07-25 Pinching tool of the semiconducter wafer Pending JPS5214372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9024175A JPS5214372A (en) 1975-07-25 1975-07-25 Pinching tool of the semiconducter wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9024175A JPS5214372A (en) 1975-07-25 1975-07-25 Pinching tool of the semiconducter wafer

Publications (1)

Publication Number Publication Date
JPS5214372A true JPS5214372A (en) 1977-02-03

Family

ID=13992988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9024175A Pending JPS5214372A (en) 1975-07-25 1975-07-25 Pinching tool of the semiconducter wafer

Country Status (1)

Country Link
JP (1) JPS5214372A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4717190A (en) * 1986-10-30 1988-01-05 Witherspoon Linda L Wafer handling and placement tool
US5217464A (en) * 1992-06-01 1993-06-08 Henry H. McDonald Three bar cross action lens implantation forceps

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920454B1 (en) * 1966-03-28 1974-05-24
JPS4921299B1 (en) * 1970-12-15 1974-05-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920454B1 (en) * 1966-03-28 1974-05-24
JPS4921299B1 (en) * 1970-12-15 1974-05-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4717190A (en) * 1986-10-30 1988-01-05 Witherspoon Linda L Wafer handling and placement tool
US5217464A (en) * 1992-06-01 1993-06-08 Henry H. McDonald Three bar cross action lens implantation forceps

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