JPS5214370A - Baking device - Google Patents
Baking deviceInfo
- Publication number
- JPS5214370A JPS5214370A JP9028375A JP9028375A JPS5214370A JP S5214370 A JPS5214370 A JP S5214370A JP 9028375 A JP9028375 A JP 9028375A JP 9028375 A JP9028375 A JP 9028375A JP S5214370 A JPS5214370 A JP S5214370A
- Authority
- JP
- Japan
- Prior art keywords
- baking device
- magnetron
- wafer
- transport
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make baking in large amount in the short time by using the high frequency heating by magnetron and the transport of wafer by air.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028375A JPS5214370A (en) | 1975-07-25 | 1975-07-25 | Baking device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028375A JPS5214370A (en) | 1975-07-25 | 1975-07-25 | Baking device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5214370A true JPS5214370A (en) | 1977-02-03 |
Family
ID=13994176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9028375A Pending JPS5214370A (en) | 1975-07-25 | 1975-07-25 | Baking device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5214370A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522832A (en) * | 1978-08-03 | 1980-02-18 | Matsushita Electric Ind Co Ltd | Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus |
JPS58135643U (en) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | Solar water heater water heater structure |
US4593168A (en) * | 1983-02-21 | 1986-06-03 | Hitachi, Ltd. | Method and apparatus for the heat-treatment of a plate-like member |
US4622447A (en) * | 1982-04-09 | 1986-11-11 | Fujitsu Limited | Microwave apparatus for vacuum treating and heating a semiconductor substrate |
US4683363A (en) * | 1981-09-17 | 1987-07-28 | Itt Industries Inc. | Microwave apparatus for processing semiconductor |
US6172322B1 (en) * | 1997-11-07 | 2001-01-09 | Applied Technology, Inc. | Annealing an amorphous film using microwave energy |
-
1975
- 1975-07-25 JP JP9028375A patent/JPS5214370A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522832A (en) * | 1978-08-03 | 1980-02-18 | Matsushita Electric Ind Co Ltd | Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus |
US4683363A (en) * | 1981-09-17 | 1987-07-28 | Itt Industries Inc. | Microwave apparatus for processing semiconductor |
JPS58135643U (en) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | Solar water heater water heater structure |
US4622447A (en) * | 1982-04-09 | 1986-11-11 | Fujitsu Limited | Microwave apparatus for vacuum treating and heating a semiconductor substrate |
US4593168A (en) * | 1983-02-21 | 1986-06-03 | Hitachi, Ltd. | Method and apparatus for the heat-treatment of a plate-like member |
US4667076A (en) * | 1983-02-21 | 1987-05-19 | Hitachi, Ltd. | Method and apparatus for microwave heat-treatment of a semiconductor water |
US6172322B1 (en) * | 1997-11-07 | 2001-01-09 | Applied Technology, Inc. | Annealing an amorphous film using microwave energy |
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