JPS5213461A - Device for manufacturing thin metal film - Google Patents
Device for manufacturing thin metal filmInfo
- Publication number
- JPS5213461A JPS5213461A JP8978575A JP8978575A JPS5213461A JP S5213461 A JPS5213461 A JP S5213461A JP 8978575 A JP8978575 A JP 8978575A JP 8978575 A JP8978575 A JP 8978575A JP S5213461 A JPS5213461 A JP S5213461A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- thin metal
- manufacturing thin
- manufacturing
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8978575A JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8978575A JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5213461A true JPS5213461A (en) | 1977-02-01 |
JPS5432636B2 JPS5432636B2 (en) | 1979-10-16 |
Family
ID=13980324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8978575A Granted JPS5213461A (en) | 1975-07-23 | 1975-07-23 | Device for manufacturing thin metal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5213461A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54152256U (en) * | 1978-04-17 | 1979-10-23 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AP2919A (en) | 2004-05-20 | 2014-05-31 | Eden Research Plc | Compositions containing a hollow glucan particle or a cell wall particle encapsulating a terpene component, methods of making and using them |
-
1975
- 1975-07-23 JP JP8978575A patent/JPS5213461A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54152256U (en) * | 1978-04-17 | 1979-10-23 | ||
JPS58695Y2 (en) * | 1978-04-17 | 1983-01-07 | 日本真空技術株式会社 | Dry plating equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS5432636B2 (en) | 1979-10-16 |
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