JPS52133086A - Gasphase growth - Google Patents

Gasphase growth

Info

Publication number
JPS52133086A
JPS52133086A JP4857476A JP4857476A JPS52133086A JP S52133086 A JPS52133086 A JP S52133086A JP 4857476 A JP4857476 A JP 4857476A JP 4857476 A JP4857476 A JP 4857476A JP S52133086 A JPS52133086 A JP S52133086A
Authority
JP
Japan
Prior art keywords
growth
supply nozzle
gasphase
samples
bradth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4857476A
Other languages
Japanese (ja)
Inventor
Akira Shintani
Masahiko Kogirima
Koji Honma
Masao Kawamura
Hiroji Saida
Yoichi Tamaoki
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4857476A priority Critical patent/JPS52133086A/en
Publication of JPS52133086A publication Critical patent/JPS52133086A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To make membrane thickness even and impurity concentration distribution uniform by arranging samples horizontally in a reaction vessel installed with a reaction gas supply nozzle and an exhaust nozzle opposite to the supply nozzle, both nozzles having bradth not smaller than the diameter of the susceptor, and by revolving the samples to carry out chemical gas phase growth.
COPYRIGHT: (C)1977,JPO&Japio
JP4857476A 1976-04-30 1976-04-30 Gasphase growth Pending JPS52133086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4857476A JPS52133086A (en) 1976-04-30 1976-04-30 Gasphase growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4857476A JPS52133086A (en) 1976-04-30 1976-04-30 Gasphase growth

Publications (1)

Publication Number Publication Date
JPS52133086A true JPS52133086A (en) 1977-11-08

Family

ID=12807157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4857476A Pending JPS52133086A (en) 1976-04-30 1976-04-30 Gasphase growth

Country Status (1)

Country Link
JP (1) JPS52133086A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59220916A (en) * 1983-05-31 1984-12-12 Toshiba Corp Vapor phase growing method and device therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59220916A (en) * 1983-05-31 1984-12-12 Toshiba Corp Vapor phase growing method and device therefor

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