JPS52133086A - Gasphase growth - Google Patents
Gasphase growthInfo
- Publication number
- JPS52133086A JPS52133086A JP4857476A JP4857476A JPS52133086A JP S52133086 A JPS52133086 A JP S52133086A JP 4857476 A JP4857476 A JP 4857476A JP 4857476 A JP4857476 A JP 4857476A JP S52133086 A JPS52133086 A JP S52133086A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- supply nozzle
- gasphase
- samples
- bradth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To make membrane thickness even and impurity concentration distribution uniform by arranging samples horizontally in a reaction vessel installed with a reaction gas supply nozzle and an exhaust nozzle opposite to the supply nozzle, both nozzles having bradth not smaller than the diameter of the susceptor, and by revolving the samples to carry out chemical gas phase growth.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4857476A JPS52133086A (en) | 1976-04-30 | 1976-04-30 | Gasphase growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4857476A JPS52133086A (en) | 1976-04-30 | 1976-04-30 | Gasphase growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52133086A true JPS52133086A (en) | 1977-11-08 |
Family
ID=12807157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4857476A Pending JPS52133086A (en) | 1976-04-30 | 1976-04-30 | Gasphase growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52133086A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59220916A (en) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | Vapor phase growing method and device therefor |
-
1976
- 1976-04-30 JP JP4857476A patent/JPS52133086A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59220916A (en) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | Vapor phase growing method and device therefor |
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