JPS52127171A - Method of new plasma reaction treatment at low temperature - Google Patents

Method of new plasma reaction treatment at low temperature

Info

Publication number
JPS52127171A
JPS52127171A JP4366276A JP4366276A JPS52127171A JP S52127171 A JPS52127171 A JP S52127171A JP 4366276 A JP4366276 A JP 4366276A JP 4366276 A JP4366276 A JP 4366276A JP S52127171 A JPS52127171 A JP S52127171A
Authority
JP
Japan
Prior art keywords
low temperature
plasma reaction
reaction treatment
new plasma
new
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4366276A
Other languages
Japanese (ja)
Other versions
JPS6040183B2 (en
Inventor
Akira Gonbara
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO OUKA KOUGIYOU KK
Original Assignee
TOKYO OUKA KOUGIYOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO OUKA KOUGIYOU KK filed Critical TOKYO OUKA KOUGIYOU KK
Priority to JP51043662A priority Critical patent/JPS6040183B2/en
Publication of JPS52127171A publication Critical patent/JPS52127171A/en
Publication of JPS6040183B2 publication Critical patent/JPS6040183B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
JP51043662A 1976-04-19 1976-04-19 Novel low-temperature plasma reaction treatment method Expired JPS6040183B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51043662A JPS6040183B2 (en) 1976-04-19 1976-04-19 Novel low-temperature plasma reaction treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51043662A JPS6040183B2 (en) 1976-04-19 1976-04-19 Novel low-temperature plasma reaction treatment method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP11300281A Division JPS57109338A (en) 1981-07-21 1981-07-21 Novel treatment of low-temperature plasma reaction

Publications (2)

Publication Number Publication Date
JPS52127171A true JPS52127171A (en) 1977-10-25
JPS6040183B2 JPS6040183B2 (en) 1985-09-10

Family

ID=12670055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51043662A Expired JPS6040183B2 (en) 1976-04-19 1976-04-19 Novel low-temperature plasma reaction treatment method

Country Status (1)

Country Link
JP (1) JPS6040183B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159840A (en) * 1984-08-31 1986-03-27 Fujitsu Ltd Vapor growth method
JP2007159467A (en) * 2005-12-13 2007-06-28 Kubota Corp Structure of gear shift operation for working vehicle

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511732U (en) * 1974-06-19 1976-01-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511732U (en) * 1974-06-19 1976-01-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159840A (en) * 1984-08-31 1986-03-27 Fujitsu Ltd Vapor growth method
JP2007159467A (en) * 2005-12-13 2007-06-28 Kubota Corp Structure of gear shift operation for working vehicle

Also Published As

Publication number Publication date
JPS6040183B2 (en) 1985-09-10

Similar Documents

Publication Publication Date Title
JPS53113762A (en) Treatment of sulfurrcontaining gas
ZA771670B (en) Method of carrying out exothermic processes
JPS51123497A (en) Method of operating reactor
JPS52156801A (en) Reaction method of isosyanates
ZA777394B (en) Process for further treatment of coke-oven gas
ZA774813B (en) Process for the treatment of coke-oven gas
EG13604A (en) Method of preparation-7-azabenzimidazoles compoundo
ZM1577A1 (en) Method of treating protozoal diseases
JPS5424849A (en) Chemical dividing method of racemiimandelicacid
JPS5373408A (en) Heat treatment method of zirconiummbased alloy
JPS52127171A (en) Method of new plasma reaction treatment at low temperature
JPS5294266A (en) Method of controlling temperature
PH13100A (en) Method of treating rice
JPS5285145A (en) Process for manufacture of 22halocyclobutanone
JPS5328378A (en) Method of plasma etching
JPS52100751A (en) Advanced treatment method of sewage
JPS5273679A (en) Method of improved plasma treatment at low temperature
SU583185A1 (en) Method of heat treatment of components
JPS5328570A (en) Method of supplying ozoneecontaining gas
JPS5383908A (en) Operating method of multiisystem heating furnace
JPS5285264A (en) Method of electric discharge treatment
JPS53655A (en) Method of impure gas exhausting treatment
JPS52155144A (en) Improved apparatus for low temperature plasma etching
JPS5340704A (en) Method of comtrolling low copolymerization reaction
JPS5386383A (en) Treating method for retaining shape of scapes