JPS52127171A - Method of new plasma reaction treatment at low temperature - Google Patents
Method of new plasma reaction treatment at low temperatureInfo
- Publication number
- JPS52127171A JPS52127171A JP4366276A JP4366276A JPS52127171A JP S52127171 A JPS52127171 A JP S52127171A JP 4366276 A JP4366276 A JP 4366276A JP 4366276 A JP4366276 A JP 4366276A JP S52127171 A JPS52127171 A JP S52127171A
- Authority
- JP
- Japan
- Prior art keywords
- low temperature
- plasma reaction
- reaction treatment
- new plasma
- new
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51043662A JPS6040183B2 (en) | 1976-04-19 | 1976-04-19 | Novel low-temperature plasma reaction treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51043662A JPS6040183B2 (en) | 1976-04-19 | 1976-04-19 | Novel low-temperature plasma reaction treatment method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11300281A Division JPS57109338A (en) | 1981-07-21 | 1981-07-21 | Novel treatment of low-temperature plasma reaction |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52127171A true JPS52127171A (en) | 1977-10-25 |
JPS6040183B2 JPS6040183B2 (en) | 1985-09-10 |
Family
ID=12670055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51043662A Expired JPS6040183B2 (en) | 1976-04-19 | 1976-04-19 | Novel low-temperature plasma reaction treatment method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6040183B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6159840A (en) * | 1984-08-31 | 1986-03-27 | Fujitsu Ltd | Vapor growth method |
JP2007159467A (en) * | 2005-12-13 | 2007-06-28 | Kubota Corp | Structure of gear shift operation for working vehicle |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511732U (en) * | 1974-06-19 | 1976-01-08 |
-
1976
- 1976-04-19 JP JP51043662A patent/JPS6040183B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511732U (en) * | 1974-06-19 | 1976-01-08 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6159840A (en) * | 1984-08-31 | 1986-03-27 | Fujitsu Ltd | Vapor growth method |
JP2007159467A (en) * | 2005-12-13 | 2007-06-28 | Kubota Corp | Structure of gear shift operation for working vehicle |
Also Published As
Publication number | Publication date |
---|---|
JPS6040183B2 (en) | 1985-09-10 |
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