JPS52122476A - Aligning method of reticles - Google Patents
Aligning method of reticlesInfo
- Publication number
- JPS52122476A JPS52122476A JP3826576A JP3826576A JPS52122476A JP S52122476 A JPS52122476 A JP S52122476A JP 3826576 A JP3826576 A JP 3826576A JP 3826576 A JP3826576 A JP 3826576A JP S52122476 A JPS52122476 A JP S52122476A
- Authority
- JP
- Japan
- Prior art keywords
- reticles
- aligning method
- reticle
- aligning
- reticle plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To achieve the improvement in accuracy through automation and the prevention of contamination by bonding a reticle plate so that of the reticle plate protrudes to the outside of a frame and aligning the reticle to the reference position of a repeater at the protruding part.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3826576A JPS52122476A (en) | 1976-04-07 | 1976-04-07 | Aligning method of reticles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3826576A JPS52122476A (en) | 1976-04-07 | 1976-04-07 | Aligning method of reticles |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52122476A true JPS52122476A (en) | 1977-10-14 |
Family
ID=12520482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3826576A Pending JPS52122476A (en) | 1976-04-07 | 1976-04-07 | Aligning method of reticles |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52122476A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59170841A (en) * | 1983-03-17 | 1984-09-27 | Nippon Seiko Kk | Positioning device of exposing device |
-
1976
- 1976-04-07 JP JP3826576A patent/JPS52122476A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59170841A (en) * | 1983-03-17 | 1984-09-27 | Nippon Seiko Kk | Positioning device of exposing device |
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