JPS52117566A - Beam position measuring method - Google Patents

Beam position measuring method

Info

Publication number
JPS52117566A
JPS52117566A JP3417276A JP3417276A JPS52117566A JP S52117566 A JPS52117566 A JP S52117566A JP 3417276 A JP3417276 A JP 3417276A JP 3417276 A JP3417276 A JP 3417276A JP S52117566 A JPS52117566 A JP S52117566A
Authority
JP
Japan
Prior art keywords
measuring method
position measuring
beam position
coil
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3417276A
Other languages
Japanese (ja)
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3417276A priority Critical patent/JPS52117566A/en
Publication of JPS52117566A publication Critical patent/JPS52117566A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To detect the axis of electronic charge beam and to find out the position by catching the AC magnetic field caused from modulated electronic beam through coil and also by utilizing the fact that the coil current increases as the beam gets near the coil.
COPYRIGHT: (C)1977,JPO&Japio
JP3417276A 1976-03-30 1976-03-30 Beam position measuring method Pending JPS52117566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3417276A JPS52117566A (en) 1976-03-30 1976-03-30 Beam position measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3417276A JPS52117566A (en) 1976-03-30 1976-03-30 Beam position measuring method

Publications (1)

Publication Number Publication Date
JPS52117566A true JPS52117566A (en) 1977-10-03

Family

ID=12406779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3417276A Pending JPS52117566A (en) 1976-03-30 1976-03-30 Beam position measuring method

Country Status (1)

Country Link
JP (1) JPS52117566A (en)

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