JPS52117566A - Beam position measuring method - Google Patents
Beam position measuring methodInfo
- Publication number
- JPS52117566A JPS52117566A JP3417276A JP3417276A JPS52117566A JP S52117566 A JPS52117566 A JP S52117566A JP 3417276 A JP3417276 A JP 3417276A JP 3417276 A JP3417276 A JP 3417276A JP S52117566 A JPS52117566 A JP S52117566A
- Authority
- JP
- Japan
- Prior art keywords
- measuring method
- position measuring
- beam position
- coil
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To detect the axis of electronic charge beam and to find out the position by catching the AC magnetic field caused from modulated electronic beam through coil and also by utilizing the fact that the coil current increases as the beam gets near the coil.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417276A JPS52117566A (en) | 1976-03-30 | 1976-03-30 | Beam position measuring method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417276A JPS52117566A (en) | 1976-03-30 | 1976-03-30 | Beam position measuring method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117566A true JPS52117566A (en) | 1977-10-03 |
Family
ID=12406779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3417276A Pending JPS52117566A (en) | 1976-03-30 | 1976-03-30 | Beam position measuring method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117566A (en) |
-
1976
- 1976-03-30 JP JP3417276A patent/JPS52117566A/en active Pending
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